In recent years, the microstructure of Co-based alloy magnetic thin film disks has been studied extensively by using a conventional x-ray diffraction (XRD) technique(1-4). Efforts to understand the relationship between the microstructure and the magnetic properties of disk had been limited due to the lack of depth resolution in the conventional theta-2theta scanning technique. In this paper, a fixed 0.5 degree of grazing incidence(5) 2-theta scan X-ray diffraction (GIXRD) technique was used to characterize the thin film disk microstructure and therefore to correlate with the magnetic properties.
