Modeling and control of a six degree-of-freedom magnetic/fluidic motion control stage
1996 ◽
Vol 4
(5)
◽
pp. 553-564
◽
Keyword(s):
2005 ◽
Vol 10
(1)
◽
pp. 50-59
◽
Keyword(s):
1991 ◽
Vol 7
(3)
◽
pp. 320-332
◽
2018 ◽
Vol 54
(11)
◽
pp. 1-5
◽
2009 ◽
Vol 45
(01)
◽
pp. 35
◽
Keyword(s):
2009 ◽
Vol 20
(10)
◽
pp. 1171-1186
◽
2018 ◽
Vol 233
(3)
◽
pp. 1133-1146