Decoupling control by the center of rotation and gravity hybrid-driven method for high-precision scan stage with multiple actuators
2016 ◽
Vol 5
(2)
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pp. 141-147
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Keyword(s):
2019 ◽
Vol 139
(5)
◽
pp. 480-487
Keyword(s):
2004 ◽
Vol 40
(09)
◽
pp. 84
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1988 ◽
Vol 46
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pp. 846-847
1991 ◽
Vol 49
◽
pp. 688-689
Keyword(s):
1995 ◽
Vol 53
◽
pp. 642-643
Keyword(s):
1997 ◽
Vol 400
(1-2)
◽
pp. 7-56
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