Decoupling Control Method for High-Precision Stages using Multiple Actuators considering the Misalignment among the Actuation Point, Center of Gravity, and Center of Rotation
2016 ◽
Vol 5
(2)
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pp. 141-147
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2019 ◽
Vol 139
(5)
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pp. 480-487
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2012 ◽
Vol 150
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pp. 30-35
2017 ◽
Vol 26
(11)
◽
pp. 1750175
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