Lithography technology and trends for advanced packaging

Author(s):  
Amandine Pizzagalli
Author(s):  
Andrew J. Komrowski ◽  
Luis A. Curiel ◽  
Daniel J. D. Sullivan ◽  
Quang Nguyen ◽  
Lisa Logan-Willams

Abstract The acquisition of reliable Acoustic Micro Images (AMI) are an essential non-destructive step in the Failure Analysis (FA) of electronic packages. Advanced packaging and new IC materials present challenges to the collection of reliable AMI signals. The AMI is complicated due to new technologies that utilize an increasing number of interfaces in ICs and packages. We present two case studies in which it is necessary to decipher the acoustic echoes from the signals generated by the interface of interest in order to acquire trustworthy information about the IC package.


2009 ◽  
Vol 1 (1) ◽  
pp. 1527-1530
Author(s):  
S. Maus ◽  
U. Hansen ◽  
J. Leib ◽  
M. Töpper

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