Improvement of Wafer Edge Defect for Finfets Technology

Author(s):  
Junhong Zhao ◽  
Hai Zhao ◽  
Jiwei Zhang
Keyword(s):  
Author(s):  
Jie Gong ◽  
Sumant Sood ◽  
Rohit Bhat ◽  
Sina Jahanbin ◽  
Prashant Aji ◽  
...  
Keyword(s):  

2011 ◽  
Author(s):  
J. R. Du ◽  
C. H. Huang ◽  
Elvis Yang ◽  
T. H. Yang ◽  
K. C. Chen ◽  
...  

Metals ◽  
2021 ◽  
Vol 11 (2) ◽  
pp. 223
Author(s):  
Dongcheng Wang ◽  
Yanghuan Xu ◽  
Bowei Duan ◽  
Yongmei Wang ◽  
Mingming Song ◽  
...  

The edge of a hot rolling strip corresponds to the area where surface defects often occur. The morphologies of several common edge defects are similar to one another, thereby leading to easy error detection. To improve the detection accuracy of edge defects, the authors of this paper first classified the common edge defects and then made a dataset of edge defect images on this basis. Subsequently, edge defect recognition models were established on the basis of LeNet-5, AlexNet, and VggNet-16 by using a convolutional neural network as the core. Through multiple groups of training and recognition experiments, the model’s accuracy and recognition time of a single defect image were analyzed and compared with recognition models with different learning rates and sample batches. The experimental results showed that the recognition model based on the AlexNet had a maximum accuracy of 93.5%, and the average recognition time of a single defect image was 0.0035 s, which could meet the industry requirement. The research results in this paper provide a new method and thought for the fine detection of edge defects in hot rolling strips and have practical significance for improving the surface quality of hot rolling strips.


2012 ◽  
Vol 500 ◽  
pp. 146-151 ◽  
Author(s):  
Ning Hou ◽  
Li Zhou ◽  
Shu Tao Huang ◽  
Li Fu Xu

In this paper, a finite element method was used to dynamically simulate the process of the edge defects formation during orthogonal cutting SiCp/Al composites. The influence of the cutting speed, cutting depth and rake angle of the PCD insert on the size of the edge defects have been investigated by using scanning electron. According to the simulated results, it can be provided that the cutting layer material has an effect on transfer stress and hinder the chip formation in the critical transition stage, and the critical transition point and distance are defined in this stage. The negative shear phenomenon is found when the chip transit to the edge defects in the flexure deformation stage, so the process of the chip formation is the basis of the edge defects formation. In addition, the relationship between the nucleation and propagation direction of the crack and the variation of the edge defect shape on the workpiece was investigated by theory, and it found that the negative shear angle formation is the primary cause of the edge defect formation. A mixed mode crack is found in the crack propagation stage. The sizes of edge defects were measured by the experiment and simulation, and the edge defect size decrease with the increasing of tool rake angle, while increase with increasing cutting depth and cutting speed.


2018 ◽  
Vol 99 (3) ◽  
pp. 153-157
Author(s):  
S. L. Kabak ◽  
V. V. Zatochnaya ◽  
Yu. M. Mel’nichenko ◽  
N. A. Savrasova ◽  
E. A. Dorokh

Fossa navicularis magna was detected in multislice spiral computed  tomography in two patients who turned to the medical centers with  pathology of the paranasal sinuses. Its appearance is determined during  the development of the basilar part of the occipital bone and the body of the sphenoid bone in embryogenesis. This fossa has the  appearance of an edge defect on the ventral surface of the clivus in  CBCT scans. Practical radiologist should interpret such a finding as a  congenital anomaly of development, but not as an invasive lesion.


2009 ◽  
Author(s):  
Masafumi Fujita ◽  
Takao Tamura ◽  
Naka Onoda ◽  
Takayuki Uchiyama

2021 ◽  
Vol 39 (4) ◽  
pp. 043006
Author(s):  
Yuhua Xiao ◽  
Yao Du ◽  
Carl Smith ◽  
Sang Ki Nam ◽  
Hoki Lee ◽  
...  

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