High-performance ZnO Thin-Film Transistors Prepared by Atomic Layer Deposition at Low Temperature

2021 ◽  
Author(s):  
Qi Li ◽  
Junchen Dong ◽  
Dedong Han ◽  
Xing Zhang ◽  
Yi Wang
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
High Performance ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Layer Deposition

36.3: Flexible ZnO Thin‐Film Transistors Fabricated on PEN Substrate by Atomic Layer Deposition at Low Temperature

2021 ◽  
Vol 52 (S2) ◽  
pp. 472-476
Author(s):  
Qi Li ◽  
Huijin Li ◽  
Junchen Dong ◽  
Jingyi Wang ◽  
Dedong Han ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Layer Deposition

Stable and High-Performance Flexible ZnO Thin-Film Transistors by Atomic Layer Deposition

2015 ◽  
Vol 7 (40) ◽  
pp. 22610-22617 ◽  
Author(s):  
Yuan-Yu Lin ◽  
Che-Chen Hsu ◽  
Ming-Hung Tseng ◽  
Jing-Jong Shyue ◽  
Feng-Yu Tsai
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
High Performance ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Layer Deposition

Schottky barrier source-gated ZnO thin film transistors by low temperature atomic layer deposition

2013 ◽  
Vol 103 (25) ◽  
pp. 253503 ◽  
Author(s):  
Alex M. Ma ◽  
Manisha Gupta ◽  
Amir Afshar ◽  
Gem Shoute ◽  
Ying Y. Tsui ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Schottky Barrier ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Layer Deposition

High-Performance ZnO Thin-Film Transistors Prepared by Atomic Layer Deposition

2019 ◽  
Vol 66 (7) ◽  
pp. 2965-2970 ◽  
Author(s):  
Huijin Li ◽  
Dedong Han ◽  
Zhuang Yi ◽  
Junchen Dong ◽  
Shengdong Zhang ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
High Performance ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Layer Deposition

High-Performance Flexible ZnO Thin-Film Transistors by Atomic Layer Deposition

2019 ◽  
Vol 40 (3) ◽  
pp. 419-422 ◽  
Author(s):  
Mengfei Wang ◽  
Xuefei Li ◽  
Xiong Xiong ◽  
Jian Song ◽  
Chengru Gu ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
High Performance ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Layer Deposition
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