Low temperature processed ZnO thin film transistors fabricated by plasma assisted atomic layer deposition

2011 ◽  
Author(s):  
Yumi Kawamura ◽  
Mai Tani ◽  
Masahiro Horita ◽  
Yasuaki Ishikawa ◽  
Yukiharu Uraoka
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Layer Deposition

36.3: Flexible ZnO Thin‐Film Transistors Fabricated on PEN Substrate by Atomic Layer Deposition at Low Temperature

2021 ◽  
Vol 52 (S2) ◽  
pp. 472-476
Author(s):  
Qi Li ◽  
Huijin Li ◽  
Junchen Dong ◽  
Jingyi Wang ◽  
Dedong Han ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Layer Deposition

Schottky barrier source-gated ZnO thin film transistors by low temperature atomic layer deposition

2013 ◽  
Vol 103 (25) ◽  
pp. 253503 ◽  
Author(s):  
Alex M. Ma ◽  
Manisha Gupta ◽  
Amir Afshar ◽  
Gem Shoute ◽  
Ying Y. Tsui ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Schottky Barrier ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Layer Deposition
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