ZAO nanorod arrays with high preferential c-axis orientation and excellent photovoltaic performance were prepared in order to apply it extensively. Aluminum- doped zinc oxide thin films were deposited on glass substrates by sol-gel method.And then by controlling processing parameters such as the amount of doped aluminum and stability, etc.well-aligned Al-doped ZnO nanorod arrays with a narrow diameter distribution were successfully grown on substrates by hydrothermal method, where the substrates were spin-coated with seed layer.The experiments show that the 2% aluminum-doped and diameter of about 50nm of ZAO thin film nanorod arrays has the best performance photoluminescence and surfactants can promote the growth of ZAO rod-like nano-structures and contribute to the formation of ZAO nanorod arrays with highly oriented nanorod arrays.