Printed thick copper films for power applications

Author(s):  
Jan Reboun ◽  
Jiri Hlina ◽  
Radek Soukup ◽  
Jan Johan
Keyword(s):  
1997 ◽  
Vol 1 (1) ◽  
pp. 225-238
Author(s):  
M. Wünsche ◽  
H. Meyer ◽  
R. Schumacher ◽  
S. Wasle ◽  
K. Doblhofer

2003 ◽  
Vol 766 ◽  
Author(s):  
Kosuke Takenaka ◽  
Masao Onishi ◽  
Manabu Takenshita ◽  
Toshio Kinoshita ◽  
Kazunori Koga ◽  
...  

AbstractAn ion-assisted chemical vapor deposition method by which Cu is deposited preferentially from the bottom of trenches (anisotropic CVD) has been proposed in order to fill small via holes and trenches. By using Ar + H2 + C2H5OH[Cu(hfac)2] discharges with a ratio H2 / (H2 + Ar) = 83%, Cu is filled preferentially from the bottom of trenches without deposition on the sidewall and top surfaces. The deposition rate on the bottom surface of trenches is experimentally found to increase with decreasing its width.


1988 ◽  
Vol 18 (3) ◽  
pp. 332-337 ◽  
Author(s):  
KAZUE TAZAKI ◽  
W. S. FYFE ◽  
KOICHI TAZAKI ◽  
J. BISCHOFF ◽  
B. R. ROCHA

2020 ◽  
Author(s):  
I-Hsin Tseng ◽  
Yun-Ting Hsu ◽  
Jihperng Leu ◽  
K. N. Tu ◽  
Chih Chen

2021 ◽  
Vol 11 (11) ◽  
pp. 5070
Author(s):  
Xesús Prieto-Blanco ◽  
Carlos Montero-Orille

In the last few years, some advances have been made in the theoretical modelling of ion exchange processes in glass. On the one hand, the equations that describe the evolution of the cation concentration were rewritten in a more rigorous manner. This was made into two theoretical frameworks. In the first one, the self-diffusion coefficients were assumed to be constant, whereas, in the second one, a more realistic cation behaviour was considered by taking into account the so-called mixed ion effect. Along with these equations, the boundary conditions for the usual ion exchange processes from molten salts, silver and copper films and metallic cathodes were accordingly established. On the other hand, the modelling of some ion exchange processes that have attracted a great deal of attention in recent years, including glass poling, electro-diffusion of multivalent metals and the formation/dissolution of silver nanoparticles, has been addressed. In such processes, the usual approximations that are made in ion exchange modelling are not always valid. An overview of the progress made and the remaining challenges in the modelling of these unique processes is provided at the end of this review.


1999 ◽  
Vol 5 (S2) ◽  
pp. 78-79
Author(s):  
C. Merlet ◽  
X. Llovet ◽  
F. Salvat

Studies of x-ray emission from thin films on substrates using an electron probe microanalyzer (EPMA) provide useful information on the characteristics of x-ray generation by electron beams. In this study, EPMA measurements of multilayered samples were performed in order to test and improve analytical and numerical models used for quantitative EPMA. These models provide relatively accurate results for samples consisting of layers with similar average atomic numbers, because of their similar properties regarding electron transport and x-ray generation. On the contrary, these models find difficulties to describe the process when the various layers have very different atomic numbers. In a previous work, we studied the surface ionization of thin copper films of various thicknesses deposited on substrates with very different atomic numbers. In the present communication, the study is extended to the case of multilayered specimens.The studied specimens consisted of thin copper films deposited on a carbon layer which, in turn, was placed on a variety of single-element substrates, ranging from Be to Bi.


2016 ◽  
Vol 52 (12) ◽  
pp. 2605-2608 ◽  
Author(s):  
C. Paquet ◽  
T. Lacelle ◽  
B. Deore ◽  
A. J. Kell ◽  
X. Liu ◽  
...  

Pyridine derivatives coordinated to copper(ii) formates are shown to have lower decomposition temperatures than the alkylamine analogues.


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