scholarly journals Solidly-mounted high frequency thickness shear mode bulk acoustic wave resonator using X-LiTaO3 thin plate and SiO2/Ta multilayer acoustic films

2021 ◽  
Author(s):  
Michio KADOTA ◽  
Yoshimi Ishii ◽  
Shuji Tanaka
Keyword(s):  
Acoustic Wave ◽  
Thin Plate ◽  
High Frequency ◽  
Bulk Acoustic Wave ◽  
Shear Mode ◽  
Thickness Shear Mode ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator ◽  
Thickness Shear

Fabrication of High Frequency Bulk Acoustic Wave Resonator Using Thinned Single-Crystal Lithium Niobate Layers

2008 ◽  
Vol 362 (1) ◽  
pp. 30-40 ◽  
Author(s):  
D. Gachon ◽  
E. Courjon ◽  
G. Martin ◽  
L. Gauthier-Manuel ◽  
J.-C. Jeannot ◽  
...  
Keyword(s):  
Lithium Niobate ◽  
Acoustic Wave ◽  
Single Crystal ◽  
High Frequency ◽  
Bulk Acoustic Wave ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator

Shear mode bulk acoustic wave resonator based on c-axis oriented AlN thin film

2008 ◽  
Vol 104 (8) ◽  
pp. 084508 ◽  
Author(s):  
Evgeny Milyutin ◽  
Sandrine Gentil ◽  
Paul Muralt
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Shear Mode ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator

Poly N-(2-cyanoethyl)pyrrole as a selective film for the thickness-shear-mode acoustic wave sensor

1995 ◽  
Vol 73 (9) ◽  
pp. 1427-1435 ◽  
Author(s):  
Zhiping Deng ◽  
David C. Stone ◽  
Michael Thompson
Keyword(s):  
Acoustic Wave ◽  
Photoelectron Spectroscopy ◽  
Electrochemical Polymerization ◽  
Shear Mode ◽  
Polymeric Coatings ◽  
Thickness Shear Mode ◽  
X Ray ◽  
Acoustic Wave Sensor ◽  
Polypyrrole Film ◽  
Thickness Shear

Poly N-(2-cyanoethyl)pyrrole films have been synthesized by electrochemical polymerization and characterized by cyclic voltammetry, scanning electron microscopy, and X-ray photoelectron spectroscopy. Polymeric coatings prepared on the surface of a thickness-shear-mode acoustic wave sensor have been used to examine response selectivity to a number of gas-phase probe molecules. The responses of the poly N-(2-cyanoethyl)pyrrole based sensor are compared with the parent polypyrrole device and rationalized in terms of the molecular interactions between probes and polymer films. The polar cyano functionality enhances interactions with analytes such as acetonitrile. Keywords: gas sensor, thickness-shear-mode acoustic wave sensor, poly N-(2-cyanoethyl)pyrrole film, polypyrrole film, conducting polymer.

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