Novel low thermal budget gate stack solutions for BTI reliability in future Logic Device technologies : Invited paper

2021 ◽  
Author(s):  
J. Franco ◽  
H. Arimura ◽  
J.-F. de Marneffe ◽  
A. Vandooren ◽  
L.-A Ragnarsson ◽  
...  
Keyword(s):  
Logic Device ◽  
Gate Stack ◽  
Thermal Budget ◽  
Low Thermal Budget

A Low Thermal Budget High Performance 0.25–0.18 µm Merged Logic Device and Dynamic Random Access Memory Application

2000 ◽  
Vol 39 (Part 1, No. 4B) ◽  
pp. 2162-2166
Author(s):  
Wen-Kuan Yeh ◽  
Yung-Chang Lin ◽  
Tung-Po Chen ◽  
Cheng-Tung Huang ◽  
Sun-Jay Chang ◽  
...  
Keyword(s):  
High Performance ◽  
Random Access ◽  
Random Access Memory ◽  
Dynamic Random Access Memory ◽  
Logic Device ◽  
Access Memory ◽  
Thermal Budget ◽  
Low Thermal Budget

Low Thermal Budget Monolithic Integration of Evanescent-Coupled Ge-on-SOI Photodetector on Si CMOS Platform

2010 ◽  
Vol 16 (1) ◽  
pp. 106-113 ◽  
Author(s):  
Kah-Wee Ang ◽  
Tsung-Yang Liow ◽  
Ming-Bin Yu ◽  
Qing Fang ◽  
Junfeng Song ◽  
...  
Keyword(s):  
Monolithic Integration ◽  
Thermal Budget ◽  
Low Thermal Budget

Improved PBTI reliability in junction-less nFET fabricated at low thermal budget for 3D Sequential Integration

2018 ◽  
Author(s):  
Zhicheng Wu ◽  
Jacopo Franco ◽  
Anne Vandooren ◽  
Ben Kaczer ◽  
Philippe Roussel ◽  
...  
Keyword(s):  
Thermal Budget ◽  
Low Thermal Budget

Low Thermal Budget Crystallization of Amorphous Silicon by Nanoclusters

2009 ◽  
Vol 12 (9) ◽  
pp. H319 ◽  
Author(s):  
Il-Suk Kang ◽  
Sung-Hun Yu ◽  
Hyun-Sang Seo ◽  
Jeong-Hun Kim ◽  
Jun-Mo Yang ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Thermal Budget ◽  
Low Thermal Budget
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