Effect of flexure hinge geometry on central deflection of piezo actuated diaphragm for micropump

Parametric simulation of multi-chamber piezoelectric pump proposed by authors shows that its flow rate is positively correlated with chamber compression ratio when height of chamber wall is not less than central deflection of circular piezoelectric unimorph actuator (CPUA). Therefore, in this paper, principle and structure of multi-chamber piezoelectric pump with novel CPUAs with three-layer structure are proposed and realized, so as to improve its chamber compression ratio, and then improve its flow rate. Its processing technology compatible with PCB processing technology is studied and its flow rate model is established. Central deflection of CPUA with three-layer structure and the flow rate characteristics are tested. Experimental results show that when the central deflection of CPUA with three-layer structure reaches the maximum value of 106.8 μm, the chamber compression ratio and flow rate of multi-chamber piezoelectric pump reach the maximum value of 50% and 3.11 mL/min, respectively. The maximum flow rate is increased by 622% compared to unimproved pump. By comparing experimental results with numerical and finite element simulation results, the realized multi-chamber piezoelectric pump has large flow rate and the established flow rate model can predict its flow rate.

Download Full-text

Design, fabrication and experimental studies of compliant flexure diaphragm for micro pump

International Journal of Engineering & Technology ◽

10.14419/ijet.v7i2.21.11838 ◽

2018 ◽

Vol 7 (2.21) ◽

pp. 66 ◽

Cited By ~ 1

Author(s):

R Roopa ◽

P Navin Karanth ◽

S M. Kulkarni

Keyword(s):

Polyvinylidene Fluoride ◽

High Performance ◽

Experimental Studies ◽

Single Layer ◽

Operating Voltage ◽

Driving Voltage ◽

Element Analysis ◽

Central Deflection ◽

Large Numbers ◽

Micro Pump

This study reports the performance of piezo actuated compliant flexure diaphragm for micropump and MEMS application. To achieve the high performance of diaphragm at the low operating voltage compliant flexure diaphragm design is introduced. Very limited work has done on the diaphragms of micropump. Large numbers of mechanical micropumps have used plane diaphragms. The central deflection of diaphragm plays an important role in defining the micropump performance. The flow rate of mechanical type micropump strongly depends on the central deflection of diaphragm. In this paper compliant flexure diaphragms are designed for micropump to achieve higher deflection at lower operating voltage. Finite element analysis of compliant flexure diaphragm with single layer PVDF (Polyvinylidene fluoride) actuator is simulated in COMSOL. Compliant flexure diaphragms with a different number of flexures are analyzed. The central deflection of compliant flexure diaphragms is measured for driving voltages of 90V to 140V in 10 steps. The deflection of the compliant flexure diaphragm mainly depends on flexure width and length, the number of flexures in the diaphragm, PVDF thickness, diaphragm thickness and driving voltage. Use of compliant flexure diaphragm for micropump will reduce the mass and driving voltage of micropump. An attempt is made to compare the results of compliant flexure diaphragms with plane diaphragms. From the experimental results it is noticed that the compliant flexure diaphragm deflection is twice that of the plane diaphragm at same driving voltage. Deflection of three flexure and four flexure compliant diaphragms is 10.5µm and 11.5µm respectively at 140V.

Download Full-text

Design and Analysis of a Miniaturization Nanoindentation and Scratch Device

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.314-316.1792 ◽

2011 ◽

Vol 314-316 ◽

pp. 1792-1795

Author(s):

Hu Huang ◽

Hong Wei Zhao ◽

Jie Yang ◽

Shun Guang Wan ◽

Jie Mi ◽

...

Keyword(s):

Finite Element Analysis ◽

Finite Element ◽

Amorphous Alloy ◽

Natural Frequencies ◽

Geometric Parameters ◽

Flexure Hinge ◽

Element Analysis ◽

Modal Characteristics

In this paper, a miniaturization nanoindentation and scratch device was developed. Finite element analysis was carried out to study static and modal characteristics of x/y flexure hinge and z axis driving hinge as well as effect of geometric parameters on output performances of z axis driving hinge. Results indicated that x/y flexure hinge and z axis driving hinge had enough strength and high natural frequencies. Geometric parameters of z axis driving hinge affected output performances significantly. The model of developed device was established. Indentation experiments of Si and amorphous alloy showed that the developed miniaturization nanoindentation and scratch device worked well and can carry out indentation experiments with certain accuracy.

Download Full-text