Non-contact measurement of silicon thin wafer warpage by THz tomography and laser triangulation

Author(s):  
T. Arnold ◽  
J. Schicker ◽  
M. Kraft ◽  
C. Hirschl
Sensors ◽  
2018 ◽  
Vol 18 (2) ◽  
pp. 504 ◽  
Author(s):  
Yassine Selami ◽  
Wei Tao ◽  
Qiang Gao ◽  
Hongwei Yang ◽  
Hui Zhao

1998 ◽  
Vol 37 (12) ◽  
pp. 255-261 ◽  
Author(s):  
Mark Johnson

A simple, laser-based reflectometer is described for the measurement of water turbidity via 180° optical scattering. Applications exist both in clean source waters (0-1000NTU) with a minimum detectable turbidity better than 1NTU, and in dense wastewater primary-clarifier sludges. The non-contact measurement is performed from a distance at least up to 10m, substantially avoiding the usual window fouling problems of optical instruments. By measuring directly in the process, through a free water surface or on the side of a flowing water stream, the difficulties of transporting sample to the instrument are also avoided. Extensions to be described allow measurement also of water colour.


2021 ◽  
Vol 11 (11) ◽  
pp. 4933
Author(s):  
Ji-Sang Yahng ◽  
Dae-Su Yee

Composite materials are increasingly being utilized in many products, such as aircrafts, wind blades, etc. Accordingly, the need for nondestructive inspection of composite materials is increasing and technologies that allow nondestructive inspection are being studied. Existing ultrasound methods are limited in their ability to detect defects due to high attenuation in composite materials, and radiographic examination methods could pose a danger to human health. Terahertz (THz) wave technology is an emerging approach that is useful for imaging of concealed objects or internal structures due to high transmittance in non-conductive materials, straightness, and safety to human health. Using high-speed THz tomography systems that we developed, we have obtained THz tomographic images of glass-fiber-reinforced polymer (GFRP) laminates with artificial internal defects such as delamination and inclusion. The defects have various thicknesses and sizes, and lie at different depths. We present THz tomographic images of GFRP samples to demonstrate the extent to which the defects can be detected with the THz tomography systems.


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