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Dependence of ultra-thin gate oxide reliability on surface cleaning approach
1998 5th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.98EX105)
◽
10.1109/icsict.1998.785877
◽
2002
◽
Cited By ~ 1
Author(s):
Gao Wenyu
◽
Liu Zhongli
◽
He Zhijing
Keyword(s):
Gate Oxide
◽
Surface Cleaning
◽
Oxide Reliability
◽
Thin Gate Oxide
Download Full-text
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Cited By
References
Ultra thin gate oxide reliability enhanced by carbon contamination free process
Applied Surface Science
◽
10.1016/s0169-4332(97)80086-4
◽
1997
◽
Vol 117-118
◽
pp. 237-240
◽
Cited By ~ 4
Author(s):
Toshiyuki Iwamoto
◽
Tadahiro Ohmi
Keyword(s):
Gate Oxide
◽
Carbon Contamination
◽
Oxide Reliability
◽
Free Process
◽
Thin Gate Oxide
Download Full-text
Thin Gate Oxide Reliability
International Test Conference 1999. Proceedings (IEEE Cat. No.99CH37034)
◽
10.1109/test.1999.805855
◽
2005
◽
Author(s):
J.L. Roehr
Keyword(s):
Gate Oxide
◽
Oxide Reliability
◽
Thin Gate Oxide
Download Full-text
Thin Gate Oxide Reliability Study Using Nano-Scaled Stress
2007 IEEE Conference on Electron Devices and Solid-State Circuits
◽
10.1109/edssc.2007.4450056
◽
2007
◽
Author(s):
Y. L. Wu
◽
C. Y. Hwang
◽
C. H. Liang
◽
S. T. Lin
◽
J. J. Liou
Keyword(s):
Gate Oxide
◽
Reliability Study
◽
Oxide Reliability
◽
Thin Gate Oxide
Download Full-text
Impact of Ti/TiN (Glue/Barrier Layer) Formation on Ultra-thin Gate Oxide Reliability (HCI and NBTI) for Deep Sub-micron CMOS Transistors
10.7567/ssdm.2003.p4-14
◽
2003
◽
Author(s):
Chuan H. Liu
◽
M.G. Chen
◽
Y. R. Yang
◽
Y. T. Loh
Keyword(s):
Barrier Layer
◽
Gate Oxide
◽
Layer Formation
◽
Cmos Transistors
◽
Oxide Reliability
◽
Thin Gate Oxide
Download Full-text
Effects of electron-beam lithography on thin gate oxide reliability
Proceedings of the 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 (Cat. No.01TH8548)
◽
10.1109/ipfa.2001.941454
◽
2002
◽
Author(s):
Pei Fen Chong
◽
Byung Jin Cho
◽
Eng Fong Chor
◽
Moon Sig Joo
Keyword(s):
Electron Beam
◽
Electron Beam Lithography
◽
Gate Oxide
◽
Oxide Reliability
◽
Thin Gate Oxide
Download Full-text
Impacts of plasma process-induced damage on ultra-thin gate oxide reliability
1997 IEEE International Reliability Physics Symposium Proceedings. 35th Annual
◽
10.1109/relphy.1997.584257
◽
2002
◽
Cited By ~ 7
Author(s):
K. Eriguchi
◽
T. Yamada
◽
Y. Kosaka
◽
M. Niwa
Keyword(s):
Gate Oxide
◽
Plasma Process
◽
Oxide Reliability
◽
Thin Gate Oxide
Download Full-text
Temperature acceleration of oxide breakdown and its impact on ultra-thin gate oxide reliability
1999 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.99CH36325)
◽
10.1109/vlsit.1999.799339
◽
2003
◽
Cited By ~ 33
Author(s):
R. Degraeve
◽
N. Pangon
◽
B. Kaczer
◽
T. Nigam
◽
G. Groeseneken
◽
...
Keyword(s):
Gate Oxide
◽
Oxide Breakdown
◽
Oxide Reliability
◽
Thin Gate Oxide
Download Full-text
Effect of charge transport through silicon nitride on thin gate oxide reliability
Applied Physics Letters
◽
10.1063/1.1526456
◽
2002
◽
Vol 81
(23)
◽
pp. 4464-4466
◽
Cited By ~ 10
Author(s):
A. Cacciato
◽
A. Scarpa
◽
S. Evseev
◽
M. Diekema
Keyword(s):
Silicon Nitride
◽
Charge Transport
◽
Gate Oxide
◽
Oxide Reliability
◽
Thin Gate Oxide
Download Full-text
Ramped current stress for fast and reliable wafer level reliability monitoring of thin gate oxide reliability
Microelectronics Reliability
◽
10.1016/s0026-2714(03)00188-4
◽
2003
◽
Vol 43
(8)
◽
pp. 1215-1220
◽
Cited By ~ 9
Author(s):
Andreas Martin
◽
Jochen von Hagen
◽
Glenn B. Alers
Keyword(s):
Gate Oxide
◽
Wafer Level
◽
Current Stress
◽
Oxide Reliability
◽
Thin Gate Oxide
◽
Reliability Monitoring
Download Full-text
Effect of deuterium anneal on thin gate oxide reliability
2005 International Conference on Integrated Circuit Design and Technology, 2005. ICICDT 2005.
◽
10.1109/icicdt.2005.1502612
◽
2005
◽
Author(s):
G. Cellere
◽
A. Paccagnella
◽
M.G. Valentinr
◽
M. Alessandri
Keyword(s):
Gate Oxide
◽
Oxide Reliability
◽
Thin Gate Oxide
Download Full-text
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