Advantage of silicon nitride gate insulator transistor by using microwave excited high-density plasma for applying 100nm technology node

2005 ◽  
Author(s):  
S. Sugawa ◽  
I. Ohshima ◽  
H. Ishino ◽  
Y. Saito ◽  
M. Hirayama ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
High Density ◽  
Gate Insulator ◽  
Technology Node ◽  
Density Plasma

Reliability of silicon nitride gate dielectrics grown at 400 °C formed by microwave-excited high-density plasma

2003 ◽  
Vol 216 (1-4) ◽  
pp. 246-251 ◽  
Author(s):  
Ichiro Ohshima ◽  
Weitao Cheng ◽  
Yasuhiro Ono ◽  
Masaaki Higuchi ◽  
Masaki Hirayama ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Gate Dielectrics ◽  
High Density ◽  
Density Plasma

High quality gate insulator film formation on SiC using by microwave-excited high-density plasma

2007 ◽  
Vol 47 (4-5) ◽  
pp. 786-789
Author(s):  
Koutarou Tanaka ◽  
Hiroaki Tanaka ◽  
Akinobu Teramoto ◽  
Shigetoshi Sugawa ◽  
Tadahiro Ohmi
Keyword(s):  
Film Formation ◽  
High Density ◽  
Gate Insulator ◽  
High Quality ◽  
Insulator Film ◽  
Density Plasma

Improved Transconductance and Gate Insulator Integrity of MISFETs with Si3N4 Gate Dielectric Fabricated by Microwave-Excited High-Density Plasma at 400℃

2001 ◽  
Author(s):  
Ichiro Ohshima ◽  
Hiroyuki Shimada ◽  
Shin-ichi Nakao ◽  
Weitao Cheng ◽  
Yasuhiro Ono ◽  
...  
Keyword(s):  
Gate Dielectric ◽  
High Density ◽  
Gate Insulator ◽  
Density Plasma

Study on SONOS Nonvolatile Memory Technology Using High-Density Plasma CVD Silicon Nitride

2004 ◽  
Vol 7 (6) ◽  
pp. G113 ◽  
Author(s):  
T. C. Chang ◽  
S. T. Yan ◽  
P. T. Liu ◽  
C. W. Chen ◽  
Y. C. Wu ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Nonvolatile Memory ◽  
High Density ◽  
Plasma Cvd ◽  
Density Plasma

Pathway to Depositing Device‐Quality 50°C Silicon Nitride in a High‐Density Plasma System

1999 ◽  
Vol 146 (6) ◽  
pp. 2254-2257 ◽  
Author(s):  
David G. Farber ◽  
Sanghoon Bae ◽  
Murat Okandan ◽  
Douglas M. Reber ◽  
Terence Kuzma ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
High Density ◽  
Plasma System ◽  
Density Plasma
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