Diluted low dielectric constant materials as bottom antireflective coating layers for both KrF and ArF lithography

2003 ◽  
Author(s):  
H.L. Chen ◽  
W.C. Chao ◽  
F.H. Ko ◽  
T.C. Chu ◽  
H.C. Cheng
Keyword(s):  
Dielectric Constant ◽  
Low Dielectric Constant ◽  
Antireflective Coating ◽  
Low Dielectric ◽  
Low Dielectric Constant Materials ◽  
Coating Layers

Low-dielectric constant FLARE 2.0 films for bottom antireflective coating layers in KrF lithography

2002 ◽  
Vol 46 (8) ◽  
pp. 1127-1131
Author(s):  
H.L Chen ◽  
H.C Cheng ◽  
M.Y Li ◽  
F.H Ko ◽  
T.Y Huang ◽  
...  
Keyword(s):  
Dielectric Constant ◽  
Low Dielectric Constant ◽  
Antireflective Coating ◽  
Low Dielectric ◽  
Coating Layers

Low-dielectric-constant FLARE 2.0 films as bottom antireflective coating layers for ArF lithography

2001 ◽  
Author(s):  
Hsuen-Li Chen ◽  
Hsu-Chun Cheng ◽  
Mei-Yi Li ◽  
Fu-Hsiang Ko ◽  
Tiao-Yuan Huang ◽  
...  
Keyword(s):  
Dielectric Constant ◽  
Low Dielectric Constant ◽  
Antireflective Coating ◽  
Low Dielectric ◽  
Coating Layers

Low Dielectric Constant Polymer Materials as Bottom Antireflective Coating Layers for both KrF and ArF Lithography

2002 ◽  
Vol 41 (Part 1, No. 6B) ◽  
pp. 4046-4050
Author(s):  
Hsuen-Li Chen ◽  
Hsu-Chun Cheng ◽  
Fu-Hsiang Ko ◽  
Tien-Chi Chu ◽  
Tiao-Yuan Huang
Keyword(s):  
Dielectric Constant ◽  
Polymer Materials ◽  
Low Dielectric Constant ◽  
Antireflective Coating ◽  
Low Dielectric ◽  
Coating Layers

Curing Process Window and Thermal Stability of Porous MSQ-Based Low-Dielectric-Constant Materials

2004 ◽  
Vol 151 (6) ◽  
pp. F146 ◽  
Author(s):  
Shou-Yi Chang ◽  
Tzu-Jen Chou ◽  
Yung-Cheng Lu ◽  
Syun-Ming Jang ◽  
Su-Jien Lin ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Dielectric Constant ◽  
Low Dielectric Constant ◽  
Process Window ◽  
Curing Process ◽  
Low Dielectric ◽  
Low Dielectric Constant Materials ◽  
Thermal Stability Of
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