Technology options for reducing contact resistances in nanoscale metal-oxide-semiconductor field-effect transistors

Author(s):  
Yee-Chia Yeo
2009 ◽  
Vol 48 (4) ◽  
pp. 04C100 ◽  
Author(s):  
Yuki Nakano ◽  
Toshikazu Mukai ◽  
Ryota Nakamura ◽  
Takashi Nakamura ◽  
Akira Kamisawa

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