Experiments on the Recirculating Planar Magnetron with Coaxial All-Cavity Extraction

2020 ◽  
Author(s):  
Nicholas M. Jordan ◽  
Drew A. Packard ◽  
Christopher J. Swenson ◽  
Sunkeerth Tummala ◽  
Y. Y. Lau ◽  
...  
Keyword(s):  
Planar Magnetron

Hard carbon and composite metal/hard carbon films prepared by a dc unbalanced planar magnetron

Vacuum ◽  
1990 ◽  
Vol 40 (3) ◽  
pp. 251-255 ◽  
Author(s):  
H Biederman ◽  
K Kohoutek ◽  
Z Chmel ◽  
V Stary ◽  
RP Howson
Keyword(s):  
Carbon Films ◽  
Hard Carbon ◽  
Planar Magnetron

Copper Filling of Deep Sub-µm Through-Holes by High-Vacuum Planar Magnetron Sputtering Using Argon Gas with Added Nitrogen: Optimum Quantity of Nitrogen in Argon Gas

2006 ◽  
Vol 45 (2A) ◽  
pp. 736-738 ◽  
Author(s):  
Shigeru Saito ◽  
Yoshio Uhara ◽  
Takahide Uenosono ◽  
Jyunichi Nagata ◽  
Minemasa Oyama ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Vacuum ◽  
Argon Gas ◽  
Optimum Quantity ◽  
Planar Magnetron

Simulation and analysis of a reentrant planar magnetron

1987 ◽  
Author(s):  
L.D. Ludeking ◽  
G.E. Thomas ◽  
W.M. Bollen
Keyword(s):  
Planar Magnetron
Sign in / Sign up

Export Citation Format

Share Document