Effect of plasma properties on the preparation of tin oxide thin film by means of DC planar magnetron plasma CVD
1988 ◽
Vol 71
(9)
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pp. 49-57
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1994 ◽
Vol 33
(Part 1, No. 12B)
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pp. 7057-7060
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2018 ◽
Vol 4
(7)
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pp. 1800032
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2017 ◽
Vol 13
(5)
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pp. 406-411
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2004 ◽
Vol 223
(1-3)
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pp. 138-143
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