High Aspect Ratio Contact Profile Control and Cryogenic Etch Process
Keyword(s):
2001 ◽
Vol 14
(3)
◽
pp. 242-254
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2003 ◽
Vol 21
(1)
◽
pp. 267
◽
Keyword(s):
2002 ◽
Vol 20
(4)
◽
pp. 1508
◽
1995 ◽
Vol 13
(6)
◽
pp. 3017
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2005 ◽
Vol 82
(2)
◽
pp. 129-135
◽
Keyword(s):