Improved TDDB reliability of 1.5 nm thick gate dielectrics grown by radical oxynitridation

Author(s):  
T. Yamamoto ◽  
T. Ezaki ◽  
K. Watanabe ◽  
M. Togo ◽  
A. Morioka ◽  
...  
Keyword(s):  
Silicon ◽  
2021 ◽  
Author(s):  
G. Sujatha ◽  
N. Mohankumar ◽  
R. Poornachandran ◽  
R. Saravana Kumar ◽  
Girish Shankar Mishra ◽  
...  

Author(s):  
Jun-Hyeok Lee ◽  
Dong-Seok Kim ◽  
Jeong-Gil Kim ◽  
Woo-Hyun Ahn ◽  
Youngho Bae ◽  
...  

2008 ◽  
Vol 354 (15-16) ◽  
pp. 1598-1607 ◽  
Author(s):  
A.-L. Deman ◽  
M. Erouel ◽  
D. Lallemand ◽  
M. Phaner-Goutorbe ◽  
P. Lang ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document