Electron Beams and Their Applications in Low Voltage Devices

1936 ◽  
Vol 24 (10) ◽  
pp. 1276-1297 ◽  
Author(s):  
H.C. Thompson
Keyword(s):  
1987 ◽  
Vol 101 ◽  
Author(s):  
J. Krishnaswamy ◽  
L. Li ◽  
G. J. Collins ◽  
H. Hiraoka ◽  
Mary Ann Caolo

ABSTRACTWe report on the successful patterning of polyamic acid over wide areas using 28 kV pulsed electron beams produced in 30 mTorr air. The pattern degradation during the 350°C, 1/2 hr, imidizing thermal cure is prevented by pulsed, flood electron beam hardening of the developed polyamic acid patterns using the same soft vacuum, pulsed electron beam apparatus. It is also shown that a CW, low voltage, 1 to 3 kV electron beam sustained oxygen discharge can be used to completely strip the hardened, imidized material which is difficult to remove by wet methods. We also present, dose versus thickness remaining characteristics as a function of electron source to substrate distance and some examples of polyimide patterning.


Author(s):  
Vincent J. Coates

Recent improvements in the design of the Coates and Welter field emission electron gun have resulted in very small probe sizes (less than 50A) with low voltage (0.5 to 2 KV) electron beams operated at probe currents in excess of 1 nanoampere. Such weak electrons do not penetrate deeply into the sample. This results in images which often show more topographical detail of surface features than can be obtained using conventional high voltage scanning electron microscopy. At low voltages, the number of secondary electrons produced for each primary electron in the beam is often greater than one.


2004 ◽  
Vol 71 (1-2) ◽  
pp. 301-305 ◽  
Author(s):  
Anthony J Berejka ◽  
Tovi Avnery ◽  
Carl Carlson

Author(s):  
D. E. Speliotis

The interaction of electron beams with a large variety of materials for information storage has been the subject of numerous proposals and studies in the recent literature. The materials range from photographic to thermoplastic and magnetic, and the interactions with the electron beam for writing and reading the information utilize the energy, or the current, or even the magnetic field associated with the electron beam.


Author(s):  
Marek Malecki ◽  
J. Victor Small ◽  
James Pawley

The relative roles of adhesion and locomotion in malignancy have yet to be clearly established. In a tumor, subpopulations of cells may be recognized according to their capacity to invade neighbouring tissue,or to enter the blood stream and metastasize. The mechanisms of adhesion and locomotion are themselves tightly linked to the cytoskeletal apparatus and cell surface topology, including expression of integrin receptors. In our studies on melanomas with Fluorescent Microscopy (FM) and Cell Sorter(FACS), we noticed that cells in cultures derived from metastases had more numerous actin bundles, then cells from primary foci. Following this track, we attempted to develop technology allowing to compare ultrastructure of these cells using correlative Transmission Electron Microscopy(TEM) and Low Voltage Scanning Electron Microscopy(LVSEM).


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