Analysis of the Scale Factor Nonlinearity of MEMS Differential Silicon Resonant Accelerometer Caused by the DETF’s Force-Frequency Nonlinear Characteristic

2022 ◽  
pp. 1-1
Author(s):  
Yang Gao ◽  
Jia Jia ◽  
Libin Huang ◽  
Lin Meng ◽  
Jinwu Tong
2017 ◽  
Vol 268 ◽  
pp. 52-60 ◽  
Author(s):  
Yonggang Yin ◽  
Zhengxiang Fang ◽  
Fengtian Han ◽  
Bin Yan ◽  
Jingxin Dong ◽  
...  

2013 ◽  
Vol 373-375 ◽  
pp. 373-381 ◽  
Author(s):  
Ran Shi ◽  
Jian Zhao ◽  
An Ping Qiu ◽  
Guo Ming Xia

Temperature is one of the most important factors affecting the accuracy of micromechanical silicon resonant accelerometer (SRA). In order to reduce the temperature sensitivity and improve the sensor performance, a new method of temperature self-compensation for SRA is presented in this paper. Utilizing the differential structure of SRA, the temperature compensation for bias and scale factor can be realized simultaneously in this method. Moreover, because no temperature sensor is needed in this method, the error in temperature measurement due to the temperature gradient between the mechanical sensitive structure and temperature sensor is avoided, and the precision of temperature compensation for SRA can be further improved. The test results obtained on SRA prototype which is developed by MEMS Inertial Technology Research Center show that, by employing the method of temperature self-compensation, the temperature coefficients of bias and scale factor are reduced from 3.1 mg/°C and 778 ppm/°C to 0.05 mg/°C and -9.4 ppm/°C, respectively.


2019 ◽  
Vol 31 (10) ◽  
pp. 1208-1219 ◽  
Author(s):  
Veronica McLaren ◽  
Salome Vanwoerden ◽  
Carla Sharp

Author(s):  
Bagus Septyanto ◽  
Dian Nurdiana ◽  
Sitti Ahmiatri Saptari

In general, surface positioning using a global satellite navigation system (GNSS). Many satellites transmit radio signals to the surface of the earth and it was detected by receiver sensors into a function of position and time. Radio waves really bad when spreading in water. So, the underwater positioning uses acoustic wave. One type of underwater positioning is USBL. USBL is a positioning system based on measuring the distance and angle. Based on distance and angle, the position of the target in cartesian coordinates can be calculated. In practice, the effect of ship movement is one of the factors that determine the accuracy of the USBL system. Ship movements like a pitch, roll, and orientation that are not defined by the receiver could changes the position of the target in X, Y and Z coordinates. USBL calibration is performed to detect an error angle. USBL calibration is done by two methods. In USBL calibration Single Position obtained orientation correction value is 1.13 ̊ and a scale factor is 0.99025. For USBL Quadrant calibration, pitch correction values is -1.05, Roll -0.02 ̊, Orientation 6.82 ̊ and scale factor 0.9934 are obtained. The quadrant calibration results deccrease the level of error position to 0.276 - 0.289m at a depth of 89m and 0.432m - 0.644m at a depth of 76m


Author(s):  
Wong Kung-Teck ◽  
Jamilah Omar ◽  
Sopia Md Yassin ◽  
Mazlina Che Mustafa ◽  
Norazilawati Abdullah ◽  
...  

2008 ◽  
pp. 39-41
Author(s):  
Regis Lamberts ◽  
Jolanda van der Velden ◽  
Ger Stienen

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