Design and test of a micromachined resonant accelerometer with high scale factor and low noise

2017 ◽  
Vol 268 ◽  
pp. 52-60 ◽  
Author(s):  
Yonggang Yin ◽  
Zhengxiang Fang ◽  
Fengtian Han ◽  
Bin Yan ◽  
Jingxin Dong ◽  
...  
Author(s):  
Zhengxiang Fang ◽  
Yonggang Yin ◽  
Yunfeng Liu ◽  
Fengtian Han

1993 ◽  
Vol 25 (4) ◽  
pp. 262
Author(s):  
Sadaomi Sakuma ◽  
Shin-ichi Kawada ◽  
Toshiyuki Muroi ◽  
Isao Masuzawa ◽  
Shigeru Nakamura ◽  
...  
Keyword(s):  

2019 ◽  
Vol 25 (12) ◽  
pp. 4645-4650 ◽  
Author(s):  
Ji Sung Lee ◽  
Boo Hyun An ◽  
Mariam Mansouri ◽  
Hamad Al Yassi ◽  
Inas Taha ◽  
...  
Keyword(s):  

2019 ◽  
Vol 300 ◽  
pp. 111665 ◽  
Author(s):  
Zhengxiang Fang ◽  
Yonggang Yin ◽  
Xiaofei He ◽  
Fengtian Han ◽  
Yunfeng Liu

Micromachines ◽  
2019 ◽  
Vol 11 (1) ◽  
pp. 42
Author(s):  
Yu-Hsuan Chen ◽  
Wei-Chang Li ◽  
Xi-Wen Xiao ◽  
Chieh-Cheng Yang ◽  
Chien-Hao Liu

With the rapid developments of the Industrial Era 4.0, numerous sensors have been employed to facilitate and monitor the quality of machining processes. Among them, accelerometers play an important role in chatter detection and suppression for reducing the tool down-time and increasing manufacturing efficiency. To date, most commonly seen accelerometers have relatively large sizes such that they can be installed only on the housing of spindles or the surfaces of workpieces that may not be able to directly capture actual vibration signals or obstruct the cutting process. To address this challenge, this research proposed a compact, wide-bandwidth resonant accelerometer that could be embedded inside high-speed spindles for real-time chatter monitoring and prediction. Composed of a double-ended tuning fork (DETF), a proof mass, and a support beam, the resonant accelerometer utilizes the resonance frequency shift of the DETF due to the bending motions of the structure during out-of-plane accelerations as the sensing mechanism. The entire structure based on commercially available quartz tuning forks (QTFs) with electrodes for symmetric-mode excitations. The advantages of this structure include low noise and wide operation bandwidth thanks to the frequency modulation scheme. A theoretical model and finite element analysis were conducted for designs and optimizations. Simulated results demonstrated that the proposed accelerometer has a size of 9.76 mm × 4.8 mm × 5.5 mm, a simulated sensitivity of 0.94 Hz/g, and a simulated working bandwidth of 3.5 kHz. The research results are expected to be beneficial for chatter detection and intelligent manufacturing.


Sensors ◽  
2020 ◽  
Vol 20 (14) ◽  
pp. 4054 ◽  
Author(s):  
Chen Wang ◽  
Fang Chen ◽  
Yuan Wang ◽  
Sina Sadeghpour ◽  
Chenxi Wang ◽  
...  

This paper reviews the research and development of micromachined accelerometers with a noise floor lower than 1 µg/√Hz. Firstly, the basic working principle of micromachined accelerometers is introduced. Then, different methods of reducing the noise floor of micromachined accelerometers are analyzed. Different types of micromachined accelerometers with a noise floor below 1 µg/√Hz are discussed. Such sensors can mainly be categorized into: (i) micromachined accelerometers with a low spring constant; (ii) with a large proof mass; (iii) with a high quality factor; (iv) with a low noise interface circuit; (v) with sensing schemes leading to a high scale factor. Finally, the characteristics of various micromachined accelerometers and their trends are discussed and investigated.


2013 ◽  
Vol 373-375 ◽  
pp. 373-381 ◽  
Author(s):  
Ran Shi ◽  
Jian Zhao ◽  
An Ping Qiu ◽  
Guo Ming Xia

Temperature is one of the most important factors affecting the accuracy of micromechanical silicon resonant accelerometer (SRA). In order to reduce the temperature sensitivity and improve the sensor performance, a new method of temperature self-compensation for SRA is presented in this paper. Utilizing the differential structure of SRA, the temperature compensation for bias and scale factor can be realized simultaneously in this method. Moreover, because no temperature sensor is needed in this method, the error in temperature measurement due to the temperature gradient between the mechanical sensitive structure and temperature sensor is avoided, and the precision of temperature compensation for SRA can be further improved. The test results obtained on SRA prototype which is developed by MEMS Inertial Technology Research Center show that, by employing the method of temperature self-compensation, the temperature coefficients of bias and scale factor are reduced from 3.1 mg/°C and 778 ppm/°C to 0.05 mg/°C and -9.4 ppm/°C, respectively.


2018 ◽  
Vol 65 (6) ◽  
pp. 5040-5050 ◽  
Author(s):  
Paolo Minotti ◽  
Stefano Dellea ◽  
Giorgio Mussi ◽  
Andrea Bonfanti ◽  
Stefano Facchinetti ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document