Piezoelectric pumps are applied in many fields, such as chemical analysis system and fluid pumping systems. Piezoelectric pumps with high output pressure can meet the needs of more fields. This article introduces the design and fabrication of a high output pressure piezoelectric pump with straight arm wheeled check valve. In this paper, the influence of straight arm wheeled check valve on the output pressure of piezoelectric pump is deeply discussed from the aspect of energy loss. This study investigated the effect of valve arm number ( N = 2, 3,4, and 5), the valve arm width ( W = 0.8, 1.0, and 1.2 mm), and the valve arm length ( L = 1.92, 2.02, and 2.12 mm) on the output pressure of piezoelectric pump. The output pressure characteristic of straight arm wheeled check valve piezoelectric pump with different valve parameters is obtained by experiment. Experimental results show that when N = 4, W = 1.0 mm, L = 2.02 mm, the output pressure of the straight arm wheeled check valve piezoelectric pump has the best output pressure of 27.41 kPa at 220 V and 85 Hz. This study provides a reference for the further application of piezoelectric pumps in fluid pumping field.
MEMS Commercialization and Future Prospects. Micro Chemical Analysis System.