Vacuum packaging technology using localized aluminum/silicon-to-glass bonding

Author(s):  
Y.T. Cheng ◽  
W.T. Hsu ◽  
L. Lin ◽  
C.T. Nguyen ◽  
K. Najafi
2002 ◽  
Vol 11 (5) ◽  
pp. 556-565 ◽  
Author(s):  
Y.-T. Cheng ◽  
Wan-Tai Hsu ◽  
K. Najafi ◽  
C.T.-C. Nguyen ◽  
Liwei Lin

2001 ◽  
Vol 2 (4) ◽  
pp. 34-38 ◽  
Author(s):  
Duck-Jung Lee ◽  
Yun-Hi Lee ◽  
Gwon-Jin Moon ◽  
Jun-Dong Kim ◽  
Won-Do Choi ◽  
...  

2014 ◽  
Vol 609-610 ◽  
pp. 1029-1032 ◽  
Author(s):  
Mei Yu Meng ◽  
Wen Dong Zhang

This paper deals with design and simulation of vibratory ring gyroscope which has good performance as resisting vibration, resisting impact, small temperature drift because of the inherent symmetry of structure. The good performance of gyroscope has verified by detailed modeling and simulation. The manufacture of gyroscope using wafer level vacuum packaging technology making the gyroscope has high quality factor .At last we test the gyroscope and the Q factor is 20300 by detecting the resonant state of the gyroscope.


2019 ◽  
Vol 943 ◽  
pp. 3-7
Author(s):  
Bin Hong ◽  
Zhen Dong Gao ◽  
Jian Ye Gao ◽  
Ya Ji ◽  
Shun Ya Lv

Due to its specific structural features, the packaging technology is quite essential for the conductive slip-ring (CSR) encapsulating with epoxy molding compounds (EMC). In this work, a modified vacuum packaging technology has been proposed which includes a pouring process and a followed soaking process. Based on the experimental results; the reliability of the CSR packaged obtains a significant improvement as its thermal stability and electric insulating property are obviously advanced, comparing with that fabricated by the normal vacuum packaging method.


2010 ◽  
Vol 5 (2) ◽  
pp. 175-180 ◽  
Author(s):  
Masafumi Kimata ◽  
Takayuki Tokuda ◽  
Akinobu Tsuchinaga ◽  
Takeshi Matsumura ◽  
Hideyuki Abe ◽  
...  

2010 ◽  
Vol 130 (6) ◽  
pp. 212-218 ◽  
Author(s):  
Takeshi Matsumura ◽  
Takayuki Tokuda ◽  
Akinobu Tsutinaga ◽  
Masafumi Kimata ◽  
Hideyuki Abe ◽  
...  

2019 ◽  
Vol 943 ◽  
pp. 48-52
Author(s):  
Kun Liang Zhang ◽  
Bin Hong ◽  
Li Peng Zhang ◽  
Ya Ji ◽  
Zhen Dong Gao ◽  
...  

Based on its specific structural features, the packaging technology is extraordinary significant for the conductive slip-ring (CSR) encapsulating with epoxy molding compounds (EMC). In this work, a modified vacuum packaging technology has been proposed which includes a pouring process.By the construction of the relevant models, the packaging technology was calculated by MATLAB and discussed. It indicates that the EMC can be easily poured into the concentric ring slit of the CSR only with a differential pressure of 200 Pa between the outside pressure and the inside pressure. On the bases of the experimental results; the EMC can easily flow up from the bottom to the top of the CSR packaging mold vertically.


2004 ◽  
Author(s):  
Patrice A. Topart ◽  
Sebastien Leclair ◽  
Christine Alain ◽  
Hubert Jerominek

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