The Design and Simulation of Vibratory Ring Gyroscope

2014 ◽  
Vol 609-610 ◽  
pp. 1029-1032 ◽  
Author(s):  
Mei Yu Meng ◽  
Wen Dong Zhang
Keyword(s):  
Modeling And Simulation ◽  
Quality Factor ◽  
Resonant State ◽  
Vacuum Packaging ◽  
Q Factor ◽  
Wafer Level ◽  
Temperature Drift ◽  
High Quality ◽  
Small Temperature ◽  
Packaging Technology

This paper deals with design and simulation of vibratory ring gyroscope which has good performance as resisting vibration, resisting impact, small temperature drift because of the inherent symmetry of structure. The good performance of gyroscope has verified by detailed modeling and simulation. The manufacture of gyroscope using wafer level vacuum packaging technology making the gyroscope has high quality factor .At last we test the gyroscope and the Q factor is 20300 by detecting the resonant state of the gyroscope.

High Quality Integrated Inductor in Fan-out Wafer-Level Packaging Technology for mm-Wave Applications

2021 ◽  
Author(s):  
Kavin Senthil Murugesan ◽  
Mykola Chernobryvko ◽  
Sherko Zinal ◽  
Marco Rossi ◽  
Ivan Ndip ◽  
...  
Keyword(s):  
Wafer Level ◽  
High Quality ◽  
Packaging Technology ◽  
Integrated Inductor ◽  
Wafer Level Packaging

Wafer-level vacuum-encapsulated rate gyroscope with high quality factor in a commercial MEMS process

2017 ◽  
Vol 23 (8) ◽  
pp. 3745-3756 ◽  
Author(s):  
Adel Merdassi ◽  
Mohamad Nizar Kezzo ◽  
Vamsy P. Chodavarapu
Keyword(s):  
Quality Factor ◽  
High Quality Factor ◽  
Wafer Level ◽  
High Quality ◽  
Mems Process

Thermoelastic Damping Based Design, Sensitivity Study and Demonstration of a Functional Hybrid Gyroscope Resonator for High Quality Factor

2021 ◽  
Vol 29 (1) ◽  
pp. 70-96
Author(s):  
N.G. Sharma ◽  
◽  
Sundararajan T. ◽  
G.S. Singh ◽  
◽  
...  
Keyword(s):  
Thin Film ◽  
Quality Factor ◽  
Sensitivity Study ◽  
Fused Silica ◽  
High Quality Factor ◽  
Q Factor ◽  
Thermoelastic Damping ◽  
High Quality ◽  
Field Problem ◽  
Macro Scale

The most critical element of Hemispherical Resonator Gyroscope (HRG) is the high quality factor (Q-factor) mechanical resonator. This paper discusses the role of thermoelastic damping (TED) on effective Q-factor. Finite element method (FEM) is used to solve this highly coupled field problem involving vibration, solid mechanics, heat transfer and thermodynamics. The major contribution of this paper is the sensitivity analysis of the effect of material property, operating temperature and dimensions to arrive at macro scale resonator configuration. Hybrid hemispherical-cylindrical configuration is proposed by studying the performance parameters such as effective mass and angular gain.The uniqueness of the present work is the sensitivity study of ultra thin film coating (volume fraction of 0.01%), coating variations and different coating configurations. The coating can reduce the Q-factor by a few orders compared to uncoated shell. It has been found that coating material selection and coating configuration are very important factors. Another significance of the present work is the realization and detailed characterization of the hybrid fused silica resonator. Thin film gold coating is done on the 3D surfaces of the realized precision resonator. Detailed coating characterization is carried out using sophisticated instruments. Very fine balancing to the order of a few mHz is achieved after coating. Q-factor measurement of the coated resonator is carried out using LDV and achieved a few millions in the final functional hybrid resonator.

Wafer-level vacuum packaging technology based on selective electroplating

2004 ◽  
Author(s):  
Patrice A. Topart ◽  
Sebastien Leclair ◽  
Christine Alain ◽  
Hubert Jerominek
Keyword(s):  
Vacuum Packaging ◽  
Wafer Level ◽  
Packaging Technology

scholarly journals Analytical Solution of FSO-Mimo System Peformance Using DWDM Optical Communication

2021 ◽  
Vol 12 (2) ◽  
Author(s):  
J. Shanthini, Et. al.
Keyword(s):  
Quality Factor ◽  
Optical Communication ◽  
Bit Error Rate ◽  
Mimo System ◽  
Weather Condition ◽  
Signal Strength ◽  
Q Factor ◽  
Data Link ◽  
High Quality ◽  
Eye Diagram

Now days, in optical communication network challenge requirement are a high quality factor, good performance in terms of parameters like Bit Error Rate (BER), Eye Diagram. An objective of this paper, to analysis the attenuation value for a haze and normal weather condition respectively, and analysis, performance result of the different optical system has been compared in terms of received signal strength and quality factor of the different haze atmosphere. In this proposed paper used FSO with SISO and FSO-MIMO system for measuring the Q-factor and BER for various data link in different atmosphere. Finally, simulation result shows that the improved FSO link over the existing technique in terms of both the parameter signal power strength and quality factor.  

A Wafer-Level Vacuum Packaging Technology Utilizing Electroplated Nickel

2002 ◽  
Author(s):  
Brian H. Stark ◽  
Khalil Najafi
Keyword(s):  
Low Cost ◽  
Rapid Development ◽  
Vacuum Packaging ◽  
Minimal Amount ◽  
Q Factor ◽  
Mems Devices ◽  
Wafer Level ◽  
High Q ◽  
Communications Systems ◽  
Increasing Demand

In recent years, there has been an increasing demand for low temperature (<400°C) packaging technologies that can vacuum seal MEMS devices at the wafer level with a minimal amount of wasted die area. Several emerging classes of devices require wafer-level vacuum packaging. There has been growing development of micro-resonators for RF communications systems [1]. The devices require the high Q-factor performance generated by vacuum sealing in order to function as highly selective filters and oscillators. There has also been considerable development in the field of resonant gyroscopes [2], which also require a low pressure ambient for optimal performance. The rapid development of MEMS devices requiring low cost vacuum packaging has outpaced the development of suitable sealing technologies.

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