Quality factor improvement of silicon nitride micro string resonators

Author(s):  
S. Schmid ◽  
B. Malm ◽  
A. Boisen
2019 ◽  
Vol 126 (16) ◽  
pp. 165108 ◽  
Author(s):  
Pedram Sadeghi ◽  
Manuel Tanzer ◽  
Simon L. Christensen ◽  
Silvan Schmid

Author(s):  
Zeru Wu ◽  
Zengkai Shao ◽  
Zihan Xu ◽  
Yanfeng Zhang ◽  
Lin Liu ◽  
...  

APL Photonics ◽  
2021 ◽  
Vol 6 (7) ◽  
pp. 071101
Author(s):  
Xingchen Ji ◽  
Samantha Roberts ◽  
Mateus Corato-Zanarella ◽  
Michal Lipson

2011 ◽  
Vol 36 (3) ◽  
pp. 421 ◽  
Author(s):  
Mughees Khan ◽  
Thomas Babinec ◽  
Murray W. McCutcheon ◽  
Parag Deotare ◽  
Marko Lončar

2021 ◽  
Author(s):  
Asha K ◽  
Narayan Krishnaswamy ◽  
N K Suryanarayana

Abstract Analysis of microcantilever beam and ARROW microcantilever waveguides are presented in this work. The microcantilever is simulated by using the silicon nitride material. Electric voltage applied creates the deformation in the cantilever beam. The deformation leads to displacement of the beam. The displacement is due to bending of the cantilever tip. The integration of MEMS cantilever and ARROW waveguide results in the ARROW microcantilever waveguide. The ARROW microcantilever waveguide quality factor, electric filed intensity and sensitivity analysis are the three important parameters presented. The quality factor is obtained by varying the air gap distance between cantilever waveguide and output waveguide. Through this simulation using FDTD sensitivity up to 73.78 nm/RIU has been achieved for the microcantilever arrow waveguide.


Author(s):  
D. R. Clarke ◽  
G. Thomas

Grain boundaries have long held a special significance to ceramicists. In part, this has been because it has been impossible until now to actually observe the boundaries themselves. Just as important, however, is the fact that the grain boundaries and their environs have a determing influence on both the mechanisms by which powder compaction occurs during fabrication, and on the overall mechanical properties of the material. One area where the grain boundary plays a particularly important role is in the high temperature strength of hot-pressed ceramics. This is a subject of current interest as extensive efforts are being made to develop ceramics, such as silicon nitride alloys, for high temperature structural applications. In this presentation we describe how the techniques of lattice fringe imaging have made it possible to study the grain boundaries in a number of refractory ceramics, and illustrate some of the findings.


Author(s):  
H.-J. Kleebe ◽  
J.S. Vetrano ◽  
J. Bruley ◽  
M. Rühle

It is expected that silicon nitride based ceramics will be used as high-temperature structural components. Though much progress has been made in both processing techniques and microstructural control, the mechanical properties required have not yet been achieved. It is thought that the high-temperature mechanical properties of Si3N4 are limited largely by the secondary glassy phases present at triple points. These are due to various oxide additives used to promote liquid-phase sintering. Therefore, many attempts have been performed to crystallize these second phase glassy pockets in order to improve high temperature properties. In addition to the glassy or crystallized second phases at triple points a thin amorphous film exists at two-grain junctions. This thin film is found even in silicon nitride formed by hot isostatic pressing (HIPing) without additives. It has been proposed by Clarke that an amorphous film can exist at two-grain junctions with an equilibrium thickness.


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