Modeling and characterization of hydrogen and hydrogen-argon discharges in resonant cavity microwave plasma reactors
2018 ◽
Vol 16
(2)
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pp. 1800153
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Keyword(s):
2008 ◽
Vol 17
(5)
◽
pp. 408-418
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1998 ◽
Vol 6
(3)
◽
pp. 143
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1995 ◽
Vol 13
(3)
◽
pp. 1121-1127
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2002 ◽
Vol 6
(3)
◽
pp. 122-127
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Keyword(s):