Study of wafer arcing on oxide etching process for advance VLSI technology

Author(s):  
Ming-Shing Fu ◽  
Ming-Chyi Liu ◽  
Ming-Shyue Hsieh ◽  
Chuan-Chieh Huang ◽  
Shou-Wen Kuo
2003 ◽  
Author(s):  
Benedicte P. Mortini ◽  
Philippe Spinelli ◽  
Francois Leverd ◽  
Veronique Dejonghe ◽  
Richard Braspenning

2014 ◽  
Vol 660 ◽  
pp. 894-898
Author(s):  
Rosminazuin A. Rahim ◽  
Badariah Bais ◽  
Majlis Burhanuddin Yeop

In this paper, a simple microcantilever release process using anisotropic wet etching is presented. The microcantilever release is conducted at the final stage of the fabrication of piezoresistive microcantilever sensor. Issues related to microcantilever release such as microscopic roughness and macroscopic roughness has been resolved using simple technique. By utilizing silicon oxide (SiO2) as the etch stop for the wet etching process, issues related to microscopic roughness can be eliminated. On the other hand, proper etching procedure with constant stirring of the etchant solution of KOH anisotropic etching significantly reduces the notching effect contributed by the macroscopic roughness. Upon the completion of microcantilever release, suspended microcantilever of 2μm thick is realized with the removal of SiO2layer using Buffered Oxide Etching (BOE).


Author(s):  
Masafumi Ito ◽  
Keigo Takeda ◽  
Tatsuo Shiina ◽  
Yasuyuki Okamura ◽  
Hisao Nagai ◽  
...  

Author(s):  
C.A.E. Lemmi ◽  
D. Booth ◽  
G.E. Adomian

In order to enrich populations of homogeneous cellular types we dissociated gastric mucosa by enzymatic techniques. In addition, we used SEM to monitor the progressive etching of the mucosa. Two enzymes were tested: collagenase III with minimum proteolytic activity and Pronase with broader proteolytic effects. The gastric mucosa was exposed to the effect of the enzymes using everted stomach preparations. In this way the digestive action occured progressively from the lumen of the stomach toward the base of the glands. This “etching” process could be monitored conveniently by SEM. After incubation for periods varying from 30 to 210 minutes the tissues were stretched on dental wax, fixed in 2 % glutaralheyde, post-fixed in osmium, dehydrated, critical point dryed and coated with gold. A model MSM-5 “Mini-SEM” was used for observation. Gentle uncurling of the preparation before coating with gold produced fractures which revealed the structure of the gastric glandsin more detail.


1992 ◽  
Vol 28 (3) ◽  
pp. 338
Author(s):  
A.S. Gozdz ◽  
J.A. Shelburne ◽  
R.S. Robinson ◽  
C.C. Chang
Keyword(s):  

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