Nonlinear Generalized Predictive Control of the Crystal Diameter in CZ-Si Crystal Growth Process Based on Stacked Sparse Autoencoder
2020 ◽
Vol 28
(3)
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pp. 1132-1139
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1993 ◽
Vol 115
(1)
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pp. 115-121
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2002 ◽
Vol 37
(1)
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pp. 77-82
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Keyword(s):
2000 ◽
Vol 66
(2-3)
◽
pp. 303-308
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Keyword(s):
2003 ◽
Vol 42
(Part 1, No. 3)
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pp. 1133-1138
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Keyword(s):