Impacts of Ge Preamorphization Implantation and Si Capping on the Specific Contact Resistivity of Ni(Pt)SiGe/p+-SiGe Contacts
2019 ◽
Vol 66
(10)
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pp. 4331-4336
1985 ◽
Vol 6
(12)
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pp. 639-641
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2020 ◽
Vol 67
(7)
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pp. 2690-2696
2018 ◽
Vol 6
(1)
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pp. 1801285
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2014 ◽
Vol 17
(4)
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pp. 394-397
Keyword(s):
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