Direct Measurements of Self-Sputtering, Swelling, and Deposition Effects of N-Type Low-Energy Ion Implantations
2009 ◽
Vol 37
(10)
◽
pp. 2082-2089
◽
1988 ◽
Vol 46
◽
pp. 624-625
1988 ◽
Vol 46
◽
pp. 666-667
1990 ◽
Vol 48
(1)
◽
pp. 354-355
1992 ◽
Vol 1101
(2)
◽
pp. 236-239
1997 ◽
Vol 241-243
(1)
◽
pp. 1156-1159
◽
1997 ◽
Vol 241-243
(1)
◽
pp. 1248-1252
Keyword(s):