Effective electromechanical coupling coefficient and quality factor control by the layer arrangement of 1.8-GHhz range film bulk acoustic wave resonators composed of ZnO, SiO/sub 2/ and Al/sub 2/O/sub 3/ thin films

2006 ◽  
Author(s):  
M. Takeuchi ◽  
H. Yamada ◽  
H. Kawamura ◽  
Y. Yoshino ◽  
T. Makino ◽  
...  
Keyword(s):  
Thin Films ◽  
Acoustic Wave ◽  
Electromechanical Coupling ◽  
Bulk Acoustic Wave ◽  
Electromechanical Coupling Coefficient ◽  
Layer Arrangement ◽  
Film Bulk ◽  
Acoustic Wave Resonators ◽  
Bulk Acoustic Wave Resonators ◽  
Effective Electromechanical Coupling Coefficient

scholarly journals Selective normal mode excitation in multilayer thin film bulk acoustic wave resonators

2014 ◽  
Vol 105 (16) ◽  
pp. 162910 ◽  
Author(s):  
Andrey Kozyrev ◽  
Anatoly Mikhailov ◽  
Sergey Ptashnik ◽  
Peter K. Petrov ◽  
Neil Alford
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Normal Mode ◽  
Bulk Acoustic Wave ◽  
Multilayer Thin Film ◽  
Mode Excitation ◽  
Film Bulk ◽  
Acoustic Wave Resonators ◽  
Bulk Acoustic Wave Resonators

Chemically Sensitized Thin-Film Bulk Acoustic Wave Resonators as Humidity Sensors

2010 ◽  
Vol 157 (12) ◽  
pp. J419 ◽  
Author(s):  
G. M. Ashley ◽  
P. B. Kirby ◽  
T. P. Butler ◽  
R. Whatmore ◽  
J. K. Luo
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Humidity Sensors ◽  
Film Bulk ◽  
Acoustic Wave Resonators ◽  
Bulk Acoustic Wave Resonators
Sign in / Sign up

Export Citation Format

Share Document