Ultra-thin film SOI/CMOS with selective-epi source/drain for low series resistance, high drive current
2020 ◽
Vol 140
(4)
◽
pp. 92-96
2007 ◽
Vol 33
(13)
◽
pp. 1083-1091
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Keyword(s):
2009 ◽
Vol 24
(9)
◽
pp. 2935-2938
◽
Keyword(s):