Study of 3D Micro-Ultrasonic Machining

2004 ◽  
Vol 126 (4) ◽  
pp. 727-732 ◽  
Author(s):  
Z. Y. Yu ◽  
K. P. Rajurkar ◽  
A. Tandon

Many manufacturing processes, such as lithography, etching, laser, electrical discharge machining (EDM), and electrochemical machining (ECM), are being applied to produce the meso- and microscale parts and products. Materials such as silicon, glass, quartz crystal, and ceramics are being increasingly used in microelectromechanical system (MEMS) devices. Ultrasonic machining (USM) offers an attractive alternative to machine some of the hard and brittle materials. However, the tool wear in micro-ultrasonic machining adversely affects the machining accuracy. Therefore, it is necessary to account for and to compensate the tool wear during machining. This paper reports the feasibility of applying the uniform wear method developed for micro electrical discharge machining and its integration with CAD/CAM to microultrasonic vibration process for generating accurate three-dimensional (3D) microcavities. Experimental results show that the tool shape remains unchanged and the tool wear has been compensated.

2012 ◽  
Vol 271-272 ◽  
pp. 1755-1760
Author(s):  
Yu Liu ◽  
Tian Min Guan ◽  
Jiang Min Ding ◽  
Fu Ling Zhao

The excessive tool wear always has a great influence on the machining accuracy in micro electrical discharge machining (micro EDM). According to the image processing on the image of tool electrodes, the contour information of the worn tools is obtained, and then the tool wear, especially the tool shape change in micro EDM is studied in this paper. Firstly, the Canny edge detection method is used to extract the outline image of the tool, the scatter points of outline image are curve fitted, and the mathematical description of the tool outline is presented. And then though the mathematical analysis of the fitting function, the tool shape change and tool wear law of micro EDM are analyzed. Finally, according to the curvature changes of fitting curves, the end wear, corner wear and side wear of cylindrical electrode in micro EDM drilling and micro EDM milling, respectively, are divided reasonably based on the analysis, and the amount of each kind of wear is quantitatively estimated.


2020 ◽  
Vol 13 (3) ◽  
pp. 219-229
Author(s):  
Baocheng Xie ◽  
Jianguo Liu ◽  
Yongqiu Chen

Background: Micro-Electrical Discharge Machining (EDM) milling is widely used in the processing of complex cavities and micro-three-dimensional structures, which is a more effective processing method for micro-precision parts. Thus, more attention has been paid on the micro-EDM milling. Objective : To meet the increasing requirement of machining quality and machining efficiency of micro- EDM milling, the processing devices and processing methods of micro-EDM milling are being improved continuously. Methods: This paper reviews various current representative patents related to the processing devices and processing methods of micro-EDM milling. Results: Through summarizing a large number of patents about processing devices and processing methods of micro-EDM milling, the main problems of current development, such as the strategy of electrode wear compensation and the development trends of processing devices and processing methods of micro-EDM milling are discussed. Conclusion: The optimization of processing devices and processing methods of micro-EDM milling are conducive to solving the problems of processing efficiency and quality. More relevant patents will be invented in the future.


2021 ◽  
Vol 2021 ◽  
pp. 1-13
Author(s):  
Bin Xin ◽  
Wei Liu

During the wire electrical discharge machining (WEDM) process, a large number of discharge pits and a recast layer are easily generated on the workpiece surface, resulting in high surface roughness. A discharge forming cutting-electrochemical machining method for fabricating single-crystal silicon is proposed in this study to solve this problem. On the same processing equipment, single-crystal silicon is first cut using the discharge forming cutting method. Second, electrochemical anodic reaction technology is used to dissolve the discharge pits and recast layer on the single-crystal silicon surface. The machining mechanism of this process, the surface elements of the processed single-crystal silicon and a comparison of the kerf width are analyzed through experiments. On this basis, the influence of the movement speed of the copper foil electrode during electrochemical anodic dissolution on the final surface roughness is qualitatively analyzed. The experimental results show that discharge forming cutting-electrochemical machining can effectively eliminate the electrical discharge pits and recast layer, which are caused by electric discharge cutting, on the surface of single-crystal silicon, thereby reducing the surface roughness of the workpiece.


2016 ◽  
Vol 40 (3) ◽  
pp. 331-349 ◽  
Author(s):  
S. Sivasankar ◽  
R. Jeyapaul

This research work concentrates on Electrical Discharge Machining (EDM) performance evaluation of ZrB2- SiC ceramic matrix composites with different tool materials at various machining parameters. Monolithic ZrB2 possesses lower relative density (98.72%) than composites. ZrB2 with 20 Vol.% of SiC possesses 99.74% of the relative density with improved hardness values. Bend strength and Young’s modulus increase with SiC addition until it reaches 20 Vol% and then decreasing. EDM performance on tool materials of tungsten, niobium, tantalum, graphite and titanium at various levels of pulse on time and pulse off time are analyzed. Graphite produces the best Material removal rate (MRR) for all the workpieces. Tool wear rate decreases with melting point and thermal conductivity of the tool material.


2021 ◽  
Author(s):  
Dragan Rodic ◽  
Marin Gostimirovic ◽  
Milenko Sekulic ◽  
Borislav Savkovic ◽  
Branko Strbac

Abstract It is well known that electrical discharge machining can be used in the processing of nonconductive materials. In order to improve the efficiency of machining modern engineering materials, existing electrical discharge machines are constantly being researched and improved or developed. The current machining of non-conductive materials is limited due to the relatively low material removal rate and high surface roughness. A possible technological improvement of electrical discharge machining can be achieved by innovations of existing processes. In this paper, a new approach for machining zirconium oxide is presented. It combines electrical discharge machining with assisting electrode and powder-mixed dielectric. The assisting electrode is used to enable electrical discharge machining of nonconductive material, while the powder-mixed dielectric is used to increase the material removal rate, reduce surface roughness, and decrease relative tool wear. The response surface method was used to generate classical mathematical models, analyzing the output performances of surface roughness, material removal rate and relative tool wear. Verification of the obtained models was performed based on a set of new experimental data. By combining these latest techniques, positive effects on machining performances are obtained. It was found that the surface roughness was reduced by 18%, the metal removal rate was increased by about 12% and the relative tool wear was reduced by up to 6% compared to electrical discharge machining with supported electrode without powder.


Author(s):  
Arun Kumar Rouniyar ◽  
Pragya Shandilya

Magnetic field assisted powder mixed electrical discharge machining is a hybrid machining process with suitable modification in electrical discharge machining combining the use of magnetic field and fine powder in the dielectric fluid. Aluminum 6061 alloy has found highly significance for the advanced industries like automotive, aerospace, electrical, marine, food processing and chemical due to good corrosion resistance, high strength-to-weight ratio, ease of weldability. In this present work, magnetic field assisted powder mixed electrical discharge machining setup was fabricated and experiments were performed using one factor at a time approach for aluminum 6061 alloy. The individual effect of machining parameters namely, peak current, pulse on time, pulse off time, powder concentration and magnetic field on material removal rate and tool wear rate was investigated. The effect of peak current was found to be dominant on material removal rate and tool wear rate followed by pulse on time, powder concentration and magnetic field. Increase in material removal rate and tool wear rate was observed with increase in peak current, pulse on time and a decrease in pulse off time, whereas, for material removal rate increases and tool wear rate decreases up to the certain value and follow the reverse trend with an increase in powder concentration. Material removal rate was increased and tool wear rate was decreased with increase in magnetic field.


Author(s):  
Yong Yang ◽  
Xiaochun Li

Micro ultrasonic Machining (MUSM) is useful for producing micro parts in brittle materials, especially ceramics. By use of suitable micro metallic dies, the efficiency of fabrication can be significantly enhanced. In this study, the LIGA process was used to generate micro nickel dies, which also served as microelectrodes in Die-sinking Electrical Discharge Machining (EDM) to produce micro tungsten dies for MUSM. With these micro metallic dies, micro ceramic components were fabricated.


2009 ◽  
Vol 626-627 ◽  
pp. 321-326
Author(s):  
Bao Xian Jia ◽  
D.S. Wang ◽  
Jing Zhe Guo

In order to obtain micro holes with high aspect ratio, a new technique of machining deep micro holes by combining EDM (Electrical Discharge Machining) with USM (Ultrasonic Machining) in inversion installing is researched. The workpiece is over the electrode. The ultrasonic vibration is affixed to the electrode. The workpiece and electrode are all immersed in working liquid. The debris generated by EDM is dropped out the hole from the gap between the electrode and the hole wall by the gravity and the pumping effect of ultrasonic vibration, so as to increasing the machining velocity and machined depth. The structural features of the machining device are described, and the exploratory experiment is carried out. The corresponding process relations are found out, which can provide references for further study of this technique. The micro holes with larger than 25 in aspect ratio are machined.


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