Influence of substrate bias on the microstructure and internal stress in Cu films deposited by filtered cathodic vacuum arc

2001 ◽  
Vol 19 (5) ◽  
pp. 2102-2108 ◽  
Author(s):  
Y. H. Cheng ◽  
B. K. Tay ◽  
S. P. Lau ◽  
X. Shi ◽  
H. S. Tan
Keyword(s):  
Internal Stress ◽  
Vacuum Arc ◽  
Substrate Bias ◽  
Cu Films ◽  
Influence Of Substrate ◽  
Filtered Cathodic Vacuum Arc

CARBON NANOCOMPOSITE THIN FILMS PREPARED BY FILTERED CATHODIC VACUUM ARC TECHNIQUE

2002 ◽  
Vol 16 (06n07) ◽  
pp. 933-945 ◽  
Author(s):  
B. K. TAY ◽  
Y. H. CHENG ◽  
S. P. LAU ◽  
X. SHI
Keyword(s):  
Surface Energy ◽  
Internal Stress ◽  
Young’S Modulus ◽  
Field Emission ◽  
Young's Modulus ◽  
Vacuum Arc ◽  
Composite Target ◽  
Emission Properties ◽  
Field Emission Properties ◽  
Filtered Cathodic Vacuum Arc

Nanocomposite amorphous carbon (a-C:Me) films including a-C:Ni , a-C:Co , a-C:Ti , a-C:W , a-C:Fe , a-C:Al , and a-C:Si films were deposited using metal-carbon composite target by filtered cathodic vacuum arc (FCVA) technique. Atomic force microscopy (AFM), Raman, and X-ray photoelectron spectroscopy (XPS) were used to characterize the morphology and structure of the films. Nanoindenter and surface profilometer were used to determine the hardness, Young's modulus, and internal stress. Contact angle and field emission experiments were used to study the surface energy and field emission properties of the films respectively. The influence of the type of elements and its composition in the target on the structural, mechanical, surface energy, and field emission properties were studied. The incorporation of elements into the films results in the decrease of sp 3 C fraction, internal stress in the deposited films, but the hardness and Young's modulus remains at high level. The effect of non-carbide forming elements in the films on the mechanical properties is more pronounced than that of carbide forming elements. The surface energy of the films increases with incorporating Ni atoms, but decreases after incorporating Fe and Al atoms into the films. After heat treatment, the incorporation of metal into ta-C films can greatly improve the field emission performance.

Deposition of CrN Coatings by Filtered Cathodic Vacuum Arc

2008 ◽  
Vol 373-374 ◽  
pp. 130-133 ◽  
Author(s):  
Ji Liang Mo ◽  
Min Hao Zhu ◽  
J. An ◽  
H. Sun ◽  
Yong Xiang Leng ◽  
...  
Keyword(s):  
Partial Pressure ◽  
Bias Voltage ◽  
Vacuum Arc ◽  
Substrate Bias ◽  
Nitrogen Partial Pressure ◽  
Substrate Bias Voltage ◽  
Crn Coating ◽  
Deposition Parameters ◽  
Filtered Cathodic Vacuum Arc ◽  
Crn Coatings

CrN coatings were deposited on cemented carbide substrates by filtered cathodic vacuum arc technique (FCVA). The effect of different deposition parameters: nitrogen partial pressure, substrate-bias voltage and preheating of the substrate, on the structural and mechanical properties of the coating was investigated. X-ray diffraction analysis was used to determine the structure and composition of the coatings. The tribological behaviour and wear properties of the coatings against Si3N4 ball at different normal loads were studied under reciprocating sliding condition. The results showed that a smooth and dense CrN coating with good properties can be obtained provided a pure Cr interlayer was pre-deposited. The optimal deposition parameters were the nitrogen partial pressure of 0.1 Pa, substrate-bias voltage of -100 V. Preheating of the substrate was no good for improving the properties of the coating. The FCVA CrN coating showed high hardness and good wear resistance, which was probably attributed to its smooth surface and dense microstructure. The wear mechanism of the CrN coating was a combination of abrasion and oxidation. However, the coating flaked off at high normal load due to the deficient adhesion strength of the coating to the substrate.

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