Integrated feature scale modeling of plasma processing of porous and solid SiO2. II. Residual fluorocarbon polymer stripping and barrier layer deposition

2004 ◽  
Vol 22 (4) ◽  
pp. 1260-1274 ◽  
Author(s):  
Arvind Sankaran ◽  
Mark J. Kushner
Keyword(s):  
Barrier Layer ◽  
Plasma Processing ◽  
Scale Modeling ◽  
Layer Deposition ◽  
Fluorocarbon Polymer ◽  
Feature Scale

scholarly journals Atomic layer deposition in porous electrodes: A pore-scale modeling study

2019 ◽  
Vol 378 ◽  
pp. 122099 ◽  
Author(s):  
Wen-Zhen Fang ◽  
Yu-Qing Tang ◽  
Chunmei Ban ◽  
Qinjun Kang ◽  
Rui Qiao ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Porous Electrodes ◽  
Pore Scale ◽  
Scale Modeling ◽  
Layer Deposition ◽  
Pore Scale Modeling ◽  
Modeling Study

Exploring Inherently Selective Plasma Processing of Nitrides and Oxides Via Hollow-Cathode Plasma-Assisted Atomic Layer Deposition

2020 ◽  
Vol MA2020-02 (23) ◽  
pp. 1664-1664
Author(s):  
Adnan Mohammad ◽  
Saidjafarzoda Ilhom ◽  
Deepa Shukla ◽  
Brian Willis ◽  
Ali K. Okyay ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Hollow Cathode ◽  
Plasma Processing ◽  
Atomic Layer ◽  
Cathode Plasma ◽  
Layer Deposition

Plasma Processing for Crystallization and Densification of Atomic Layer Deposition BaTiO3 Thin Films

2014 ◽  
Vol 6 (13) ◽  
pp. 10656-10660 ◽  
Author(s):  
Jihwan An ◽  
Takane Usui ◽  
Manca Logar ◽  
Joonsuk Park ◽  
Dickson Thian ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Plasma Processing ◽  
Atomic Layer ◽  
Layer Deposition

Atomic-layer deposition of ZrO2 with a Si nitride barrier layer

2002 ◽  
Vol 81 (15) ◽  
pp. 2824-2826 ◽  
Author(s):  
Anri Nakajima ◽  
Toshirou Kidera ◽  
Hiroyuki Ishii ◽  
Shin Yokoyama
Keyword(s):  
Atomic Layer Deposition ◽  
Barrier Layer ◽  
Atomic Layer ◽  
Layer Deposition

Predictive modeling of atomic layer deposition on the feature scale

2002 ◽  
Vol 410 (1-2) ◽  
pp. 129-141 ◽  
Author(s):  
Matthias K. Gobbert ◽  
Vinay Prasad ◽  
Timothy S. Cale
Keyword(s):  
Atomic Layer Deposition ◽  
Predictive Modeling ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Feature Scale
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