Scanning spreading resistance microscopy of two-dimensional diffusion of boron implanted in free-standing silicon nanostructures
2005 ◽
Vol 23
(1)
◽
pp. 76
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Keyword(s):
1975 ◽
Vol 62
(8)
◽
pp. 3204-3207
◽
1999 ◽
Vol 49
(4-5)
◽
pp. 331-349
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Keyword(s):
Keyword(s):