Characterization of neutral beam source based on pulsed inductively coupled discharge: Time evolution of ion fluxes entering neutralizer

2007 ◽  
Vol 25 (1) ◽  
pp. 134-140 ◽  
Author(s):  
Sergey N. Abolmasov ◽  
Takuya Ozaki ◽  
Seiji Samukawa
Keyword(s):  
Time Evolution ◽  
Ion Fluxes ◽  
Neutral Beam ◽  
Discharge Time ◽  
Beam Source ◽  
Inductively Coupled

200-mm-diameter neutral beam source based on inductively coupled plasma etcher and silicon etching

2010 ◽  
Vol 28 (5) ◽  
pp. 1169-1174 ◽  
Author(s):  
Tomohiro Kubota ◽  
Osamu Nukaga ◽  
Shinji Ueki ◽  
Masakazu Sugiyama ◽  
Yoshimasa Inamoto ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Neutral Beam ◽  
Silicon Etching ◽  
Beam Source ◽  
Inductively Coupled

scholarly journals Merits of microwave plasmas for optical emission spectrometry – characterization of an axially viewed microwave-sustained, inductively coupled, atmospheric-pressure plasma (MICAP)

2020 ◽  
Vol 35 (10) ◽  
pp. 2369-2377
Author(s):  
Helmar Wiltsche ◽  
Matthias Wolfgang
Keyword(s):  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Optical Emission ◽  
Plasma Source ◽  
Optical Emission Spectrometry ◽  
Emission Spectrometry ◽  
Icp Oes ◽  
Microwave Plasmas ◽  
Inductively Coupled

The MICAP is a microwave driven plasma source employing nitrogen as the plasma gas. In this work we compare LODs and LOQs obtained in axial viewing with those obtained by ICP-OES and evaluate the effect of air instead of nitrogen as the plasma gas.

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