Spatial atomic layer deposition: Performance of low temperature H2O and O3 oxidant chemistry for flexible electronics encapsulation
2015 ◽
Vol 33
(3)
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pp. 031603
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2012 ◽
Vol 30
(1)
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pp. 01A142
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2019 ◽
Vol 45
(6)
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pp. 7407-7412
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2015 ◽
Vol 33
(4)
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pp. 041512
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