Low temperature and roll-to-roll spatial atomic layer deposition for flexible electronics

2012 ◽  
Vol 30 (1) ◽  
pp. 01A142 ◽  
Author(s):  
Paul Poodt ◽  
Raymond Knaapen ◽  
Andrea Illiberi ◽  
Fred Roozeboom ◽  
Almie van Asten
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Flexible Electronics ◽  
Atomic Layer ◽  
Roll To Roll ◽  
Layer Deposition

Roll-to-roll atomic layer deposition process for flexible electronics encapsulation applications

2014 ◽  
Vol 32 (5) ◽  
pp. 051603 ◽  
Author(s):  
Philipp S. Maydannik ◽  
Tommi O. Kääriäinen ◽  
Kimmo Lahtinen ◽  
David C. Cameron ◽  
Mikko Söderlund ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Flexible Electronics ◽  
Atomic Layer ◽  
Deposition Process ◽  
Atomic Layer Deposition Process ◽  
Roll To Roll ◽  
Layer Deposition

scholarly journals Low temperature temporal and spatial atomic layer deposition of TiO2 films

2015 ◽  
Vol 33 (4) ◽  
pp. 041512 ◽  
Author(s):  
Morteza Aghaee ◽  
Philipp S. Maydannik ◽  
Petri Johansson ◽  
Jurkka Kuusipalo ◽  
Mariadriana Creatore ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Tio2 Films ◽  
Layer Deposition ◽  
Temporal And Spatial

Low Temperature Epitaxial Oxide Ultrathin Films and Nanostructures by Atomic Layer Deposition

2012 ◽  
Vol 24 (19) ◽  
pp. 3732-3737 ◽  
Author(s):  
Mariona Coll ◽  
Jaume Gazquez ◽  
Anna Palau ◽  
Maria Varela ◽  
Xavier Obradors ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Ultrathin Films ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Epitaxial Oxide

Hysteresis-free HfO2 film grown by atomic layer deposition at low temperature

2011 ◽  
Vol 519 (22) ◽  
pp. 7723-7726 ◽  
Author(s):  
J. Shen ◽  
C.Y. Zhang ◽  
T.T. Xu ◽  
A.N. Jiang ◽  
Z.Y. Zhang ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Hfo2 Film ◽  
Layer Deposition
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