Study of electron-beam and extreme-ultraviolet resist utilizing polarity change and radical crosslinking

2018 ◽  
Vol 36 (3) ◽  
pp. 031601 ◽  
Author(s):  
Satoshi Enomoto ◽  
Takahiro Kozawa
Keyword(s):  
Electron Beam ◽  
Extreme Ultraviolet ◽  
Polarity Change

Development of extreme ultraviolet mask pattern inspection technology using projection electron beam optics

2013 ◽  
Vol 12 (2) ◽  
pp. 021003 ◽  
Author(s):  
Ryoichi Hirano ◽  
Hidehiro Watanabe ◽  
Susumu Iida ◽  
Tsuyoshi Amano ◽  
Tsuneo Terasawa ◽  
...  
Keyword(s):  
Electron Beam ◽  
Extreme Ultraviolet ◽  
Mask Pattern ◽  
Beam Optics

scholarly journals Universal direct patterning of colloidal quantum dots by (extreme) ultraviolet and electron beam lithography

Nanoscale ◽  
2020 ◽  
Vol 12 (20) ◽  
pp. 11306-11316
Author(s):  
Christian D. Dieleman ◽  
Weiyi Ding ◽  
Lianjia Wu ◽  
Neha Thakur ◽  
Ivan Bespalov ◽  
...  
Keyword(s):  
Quantum Dots ◽  
Electron Beam ◽  
Electron Beam Lithography ◽  
Extreme Ultraviolet ◽  
Luminescent Properties ◽  
Colloidal Quantum Dots ◽  
Direct Patterning ◽  
One Step ◽  
Patterning Technique

A general, one-step patterning technique for colloidal quantum dots by direct optical or e-beam lithography. Photons (5.5–91.9 eV) and electrons (3 eV–50 kV) crosslink and immobilize QDs down to tens of nm while preserving the luminescent properties.

EXTREME-ULTRAVIOLET SPECTROSCOPY OF Fe VI-Fe XV AND ITS DIAGNOSTIC APPLICATION FOR ELECTRON BEAM ION TRAP PLASMAS

2009 ◽  
Vol 696 (2) ◽  
pp. 2275-2289 ◽  
Author(s):  
G. Y. Liang ◽  
T. M. Baumann ◽  
J. R. Crespo López-Urrutia ◽  
S. W. Epp ◽  
H. Tawara ◽  
...  
Keyword(s):  
Electron Beam ◽  
Ion Trap ◽  
Extreme Ultraviolet ◽  
Ultraviolet Spectroscopy ◽  
Diagnostic Application ◽  
Electron Beam Ion Trap

scholarly journals Electron-bunch lengthening on higher-harmonic oscillations in storage-ring free-electron lasers

2017 ◽  
Vol 24 (5) ◽  
pp. 912-918 ◽  
Author(s):  
Norihiro Sei ◽  
Hiroshi Ogawa ◽  
Shuichi Okuda
Keyword(s):  
Electron Beam ◽  
Storage Ring ◽  
Free Electron ◽  
Free Electron Laser ◽  
Cavity Length ◽  
Extreme Ultraviolet ◽  
Bunch Length ◽  
Free Electron Lasers ◽  
X Ray ◽  
Higher Harmonic

The influence of higher-harmonic free-electron laser (FEL) oscillations on an electron beam have been studied by measuring its bunch length at the NIJI-IV storage ring. The bunch length and the lifetime of the electron beam were measured, and were observed to have become longer owing to harmonic lasing, which is in accord with the increase of the FEL gain. It was demonstrated that the saturated FEL power could be described by the theory of bunch heating, even for the harmonic lasing. Cavity-length detuning curves were measured for the harmonic lasing, and it was found that the width of the detuning curve was proportional to a parameter that depended on the bunch length. These experimental results will be useful for developing compact resonator-type FELs by using higher harmonics in the extreme-ultraviolet and the X-ray regions.

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