Secondary ion mass spectrometry and x-ray photoelectron spectroscopy correlation study of nitrided gate oxide
2000 ◽
Vol 18
(4)
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pp. 1056-1060
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2011 ◽
Vol 29
(4)
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pp. 04D113
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1994 ◽
Vol 12
(3)
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pp. 671-676
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1995 ◽
Vol 91
(2)
◽
pp. 381
◽
1994 ◽
Vol 12
(1)
◽
pp. 147
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