New approach to low temperature deposition of high-quality thin films by electron cyclotron resonance microwave plasmas

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.586185 ◽

1992 ◽

Vol 10 (5) ◽

pp. 2170 ◽

Author(s):

T. T. Chau

Keyword(s):

Low Temperature ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Microwave Plasmas ◽

High Quality ◽

New Approach ◽

Temperature Deposition ◽

Resonance Microwave

Download Full-text

Low-temperature deposition of high-quality silicon dioxide films by sputtering-type electron cyclotron resonance plasma

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580664 ◽

1997 ◽

Vol 15 (4) ◽

pp. 1951-1954 ◽

Author(s):

H. Nakashima ◽

K. Furukawa ◽

Y. C. Liu ◽

D. W. Gao ◽

Y. Kashiwazaki ◽

...

Keyword(s):

Low Temperature ◽

Silicon Dioxide ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

High Quality ◽

Electron Cyclotron Resonance Plasma ◽

Low Temperature Deposition ◽

Temperature Deposition ◽

Resonance Plasma

Download Full-text

Low temperature deposition of SiN[sub x]:H using SiH[sub 4]–N[sub 2] or SiH[sub 4]–NH[sub 3] distributed electron cyclotron resonance microwave plasma

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.589579 ◽

1997 ◽

Vol 15 (6) ◽

pp. 1919 ◽

Author(s):

F. Delmotte

Keyword(s):

Low Temperature ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Plasma ◽

Electron Cyclotron ◽

Low Temperature Deposition ◽

Temperature Deposition ◽

Resonance Microwave

Download Full-text

Low-Temperature Sputter-Deposition of Ni-Zn Ferrite Thin Films Using Electron-Cyclotron-Resonance Microwave Plasma.

Journal of the Magnetics Society of Japan ◽

10.3379/jmsjmag.27.363 ◽

2003 ◽

Vol 27 (4) ◽

pp. 363-366 ◽

Author(s):

S. Yamamoto ◽

H. Wada ◽

H. Kurisu ◽

M. Matsuura ◽

Y. Shimosato

Keyword(s):

Low Temperature ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Plasma ◽

Sputter Deposition ◽

Electron Cyclotron ◽

Ferrite Thin Films ◽

Resonance Microwave

Download Full-text

Nanometer scale fabrication in mercury cadmium telluride using methane/hydrogen electron cyclotron resonance microwave plasmas

Applied Physics Letters ◽

10.1063/1.109390 ◽

1993 ◽

Vol 62 (19) ◽

pp. 2362-2364 ◽

Author(s):

C. R. Eddy ◽

E. A. Dobisz ◽

C. A. Hoffman ◽

J. R. Meyer

Keyword(s):

Cadmium Telluride ◽

Cyclotron Resonance ◽

Mercury Cadmium Telluride ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Nanometer Scale ◽

Microwave Plasmas ◽

Resonance Microwave

Download Full-text

7231. Deposition of diamond-like films by electron cyclotron resonance microwave plasmas

Vacuum ◽

10.1016/0042-207x(91)91038-p ◽

1991 ◽

Vol 42 (8-9) ◽

pp. 574

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Microwave Plasmas ◽

Resonance Microwave

Download Full-text

Silicon carbon alloy thin film depositions using electron cyclotron resonance microwave plasmas

10.1109/pvsc.1990.111873 ◽

2002 ◽

Author(s):

Y.H. Shing ◽

F.S. Pool

Keyword(s):

Thin Film ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Alloy Thin Film ◽

Microwave Plasmas ◽

Silicon Carbon ◽

Resonance Microwave

Download Full-text

Formation of CN x thin films by reactive pulsed laser deposition assisted by electron cyclotron resonance microwave discharge

Applied Physics A ◽

10.1007/s003390100806 ◽

2001 ◽

Vol 73 (5) ◽

pp. 605-608 ◽

Author(s):

W. Shi ◽

J.D. Wu ◽

J. Sun ◽

H. Ling ◽

Z.F. Ying ◽

...

Keyword(s):

Pulsed Laser Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Discharge ◽

Pulsed Laser ◽

Electron Cyclotron ◽

Laser Deposition ◽

Resonance Microwave

Download Full-text

Growth of gallium nitride thin films by electron cyclotron resonance microwave plasma‐assisted molecular beam epitaxy

Journal of Applied Physics ◽

10.1063/1.353870 ◽

1993 ◽

Vol 73 (1) ◽

pp. 448-455 ◽

Author(s):

C. R. Eddy ◽

T. D. Moustakas ◽

J. Scanlon

Keyword(s):

Gallium Nitride ◽

Molecular Beam Epitaxy ◽

Cyclotron Resonance ◽

Molecular Beam ◽

Electron Cyclotron Resonance ◽

Microwave Plasma ◽

Electron Cyclotron ◽

Resonance Microwave

Download Full-text

In situ FT-IR reflective absorption spectroscopy for characterization of SiO2 thin films deposited using sputtering-type electron cyclotron resonance microwave plasma

Applied Surface Science ◽

10.1016/s0169-4332(97)00294-8 ◽

1997 ◽

Vol 121-122 ◽

pp. 228-232 ◽

Author(s):

Katsuhiko Furukawa ◽

Yichun Liu ◽

Dawei Gao ◽

Hiroshi Nakashima ◽

Kiichiro Uchino ◽

...

Keyword(s):

Absorption Spectroscopy ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Plasma ◽

Electron Cyclotron ◽

Ft Ir ◽

Resonance Microwave

Download Full-text

Low-Temperature Deposition of Hydrogenated Amorphous Silicon in an Electron Cyclotron Resonance Reactor for Flexible Displays

Proceedings of the IEEE ◽

10.1109/jproc.2005.851533 ◽

2005 ◽

Vol 93 (7) ◽

pp. 1364-1373 ◽

Author(s):

A.J. Flewitt ◽

W.I. Milne

Keyword(s):

Low Temperature ◽

Amorphous Silicon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Hydrogenated Amorphous Silicon ◽

Electron Cyclotron ◽

Flexible Displays ◽

Low Temperature Deposition ◽

Temperature Deposition ◽

Hydrogenated Amorphous

Download Full-text