Phenomenological modeling of ion-enhanced surface kinetics in fluorine-based plasma etching
1993 ◽
Vol 11
(4)
◽
pp. 1243
◽
2006 ◽
Vol 24
(5)
◽
pp. 1906-1913
◽
Keyword(s):
1980 ◽
2006 ◽
Vol 24
(5)
◽
pp. 1920-1927
◽
Keyword(s):
2006 ◽
Vol 24
(5)
◽
pp. 1914-1919
◽
1996 ◽
Vol 54
◽
pp. 944-945
1990 ◽
Vol 48
(4)
◽
pp. 566-567
1972 ◽
Vol 33
(C6)
◽
pp. C6-196-C6-201