Evaluation of surface damage on GaAs etched with an electron cyclotron resonance source

1994 ◽  
Vol 12 (6) ◽  
pp. 3382 ◽  
Author(s):  
K. K. Ko
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Surface Damage ◽  
Electron Cyclotron

Surface Damage on GaAs Etched Using a Multipolar Electron Cyclotron Resonance Source

1994 ◽  
Vol 141 (1) ◽  
pp. 255-258 ◽  
Author(s):  
K. K. Ko ◽  
S. W. Pang
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Surface Damage ◽  
Electron Cyclotron

Near‐surface damage and contamination of silicon following electron cyclotron resonance etching

1990 ◽  
Vol 8 (3) ◽  
pp. 2939-2944 ◽  
Author(s):  
A. S. Yapsir ◽  
G. Fortuño‐Wiltshire ◽  
J. P. Gambino ◽  
R. H. Kastl ◽  
C. C. Parks
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Surface Damage ◽  
Electron Cyclotron ◽  
Near Surface

CALIBRATION OF HIGH MAGNETIC FIELDS USING FREE ELECTRON CYCLOTRON RESONANCE IN A PLASMA

1984 ◽  
Vol 45 (C1) ◽  
pp. C1-961-C1-963
Author(s):  
J. C. Maan ◽  
H.-J. Schneider Muntau ◽  
A. Dorelon
Keyword(s):  
Magnetic Fields ◽  
Free Electron ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
High Magnetic Fields

MBE grown Npn AlGaAs/GaAs bipolar transistors with C p doping by electron cyclotron resonance source activated methane

1991 ◽  
Vol 27 (5) ◽  
pp. 465 ◽  
Author(s):  
G. Liu ◽  
D. Mui ◽  
S. Fang ◽  
G. Gao ◽  
H. Morkoç
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Bipolar Transistors ◽  
Electron Cyclotron

Anisotropic electron cyclotron resonance etching of tungsten films on GaAs

1994 ◽  
Vol 30 (1) ◽  
pp. 84-85 ◽  
Author(s):  
R.J. Shul ◽  
D.J. Rieger ◽  
C. Constantine ◽  
A.G. Baca ◽  
C. Barratt
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron

Exploration of the afterglow of the pulsed electron cyclotron resonance source under the injection of neutral fluxes

1998 ◽  
Vol 69 (2) ◽  
pp. 1129-1131 ◽  
Author(s):  
V. Mironov ◽  
G. Shirkov ◽  
O. Strekalovsky ◽  
N. Tokareva
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron
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