Determination of line edge roughness in low dose top-down scanning electron microscopy images

Mapping Intimacies ◽

10.1117/12.2046493 ◽

2014 ◽

Author(s):

T. Verduin ◽

P. Kruit ◽

C. W. Hagen

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Low Dose ◽

Line Edge Roughness ◽

Top Down ◽

Edge Roughness ◽

Microscopy Images ◽

Scanning Electron

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Determination of line edge roughness in low-dose top-down scanning electron microscopy images

Journal of Micro/Nanolithography MEMS and MOEMS ◽

10.1117/1.jmm.13.3.033009 ◽

2014 ◽

Vol 13 (3) ◽

pp. 033009 ◽

Author(s):

Thomas Verduin ◽

Pieter Kruit ◽

Cornelis W. Hagen

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Low Dose ◽

Line Edge Roughness ◽

Top Down ◽

Edge Roughness ◽

Microscopy Images ◽

Scanning Electron

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The effect of sidewall roughness on line edge roughness in top-down scanning electron microscopy images

10.1117/12.2085768 ◽

2015 ◽

Author(s):

T. Verduin ◽

S. R. Lokhorst ◽

P. Kruit ◽

C. W. Hagen

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Line Edge Roughness ◽

Top Down ◽

Sidewall Roughness ◽

Edge Roughness ◽

On Line ◽

Microscopy Images ◽

Scanning Electron

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Quantification of line-edge roughness of photoresists. I. A comparison between off-line and on-line analysis of top-down scanning electron microscopy images

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1570845 ◽

2003 ◽

Vol 21 (3) ◽

pp. 1008 ◽

Author(s):

G. P. Patsis ◽

V. Constantoudis ◽

A. Tserepi ◽

E. Gogolides ◽

G. Grozev

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Line Edge Roughness ◽

Top Down ◽

Edge Roughness ◽

On Line ◽

Microscopy Images ◽

Line Analysis ◽

Scanning Electron

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Understanding the influence of 3D sidewall roughness on observed line-edge roughness in scanning electron microscopy images

Metrology, Inspection, and Process Control for Microlithography XXXIV ◽

10.1117/12.2550240 ◽

2020 ◽

Author(s):

Luc Van Kessel ◽

Thomas Huisman ◽

Cornelis Hagen

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Line Edge Roughness ◽

Sidewall Roughness ◽

Edge Roughness ◽

Microscopy Images ◽

Scanning Electron

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Understanding the influence of three-dimensional sidewall roughness on observed line-edge roughness in scanning electron microscopy images

Journal of Micro/Nanolithography MEMS and MOEMS ◽

10.1117/1.jmm.19.3.034002 ◽

2020 ◽

Vol 19 (03) ◽

Author(s):

Luc van Kessel ◽

Thomas Huisman ◽

Cornelis W. Hagen

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Three Dimensional ◽

Line Edge Roughness ◽

Sidewall Roughness ◽

Edge Roughness ◽

Microscopy Images ◽

Scanning Electron

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Sparsity based noise removal from low dose scanning electron microscopy images

10.1117/12.2078438 ◽

2015 ◽

Author(s):

A. Lazar ◽

P. S. Fodor

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Low Dose ◽

Noise Removal ◽

Microscopy Images ◽

Scanning Electron

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Understanding the relationship between true and measured resist feature critical dimension and line edge roughness using a detailed scanning electron microscopy simulator

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.3517717 ◽

2010 ◽

Vol 28 (6) ◽

pp. C6H34-C6H39 ◽

Author(s):

Richard A. Lawson ◽

Clifford L. Henderson

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Critical Dimension ◽

Line Edge Roughness ◽

Edge Roughness ◽

The Relationship ◽

Scanning Electron

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Three-dimensional simulation of top down scanning electron microscopy images

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1825019 ◽

2004 ◽

Vol 22 (6) ◽

pp. 3399 ◽

Author(s):

Luca Grella ◽

Gian Lorusso ◽

Paul Lee ◽

Fan Frank ◽

David L. Adler

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Three Dimensional ◽

Top Down ◽

Dimensional Simulation ◽

Microscopy Images ◽

Scanning Electron

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Ambient air. Determination of numerical concentration of inorganic fibrous particles. Scanning electron microscopy method

10.3403/02711247 ◽

2002 ◽

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Ambient Air ◽

Microscopy Method ◽

Scanning Electron Microscopy Method ◽

Electron Microscopy Method ◽

Scanning Electron ◽

Numerical Concentration

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Ambient air � Determination of numerical concentration of inorganic fibrous particles � Scanning electron microscopy method

10.3403/30375051 ◽

2019 ◽

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Ambient Air ◽

Microscopy Method ◽

Scanning Electron Microscopy Method ◽

Electron Microscopy Method ◽

Scanning Electron ◽

Numerical Concentration

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