Inspection technique of latent flaws on fine polished glass substrates using stress-induced light scattering method

2014 ◽  
Author(s):  
Yoshitaro Sakata ◽  
Kazufumi Sakai ◽  
Kazuhiro Nonaka
Keyword(s):  
Light Scattering ◽  
Polished Glass ◽  
Scattering Method ◽  
Glass Substrates

Selective detection of microcracks under the surface of glass substrates by non-contact stress-induced light-scattering method with temperature variations

2022 ◽  
Author(s):  
Yoshitaro Sakata ◽  
Nao TERASAKI
Keyword(s):  
Light Scattering ◽  
Flexible Electronics ◽  
Glass Substrate ◽  
Scattering Method ◽  
Selective Detection ◽  
Thin Glass ◽  
Glass Substrates ◽  
Heating Device ◽  
Light Scattering Intensity ◽  
Global Movements

Abstract Demand for flexible electronics is increasing due to recent global movements related to IoT. In particular, the ultra-thin glass substrate can be bent, its use is expanding for various applications such as thin liquid crystal panels. On the other hand, fine-polishing techniques such as chemical mechanical polishing treatments, are important techniques in glass substrate manufacturing. However, these techniques may cause microcracks under the surface of glass substrates because they use mechanical friction. We propose a novel non-contact thermal stress-induced light-scattering method (N-SILSM) using a heating device for inspecting surfaces to detect polishing-induced microcracks. In this report, we carry out the selective detection of microcracks and tiny particles using a N-SILSM with temperature variation. Our results show that microcracks and tiny particles can be distinguished and measured by a N-SILSM utilizing temperature change, and that microcrack size can be estimated based on the change in light-scattering intensity.

A light-scattering method for soot concentration measurements

1970 ◽  
Vol 14 (2) ◽  
pp. 161-169 ◽  
Author(s):  
W.H. Dalzell ◽  
G.C. Williams ◽  
H.C. Hottel
Keyword(s):  
Light Scattering ◽  
Scattering Method ◽  
Soot Concentration ◽  
Concentration Measurements

The Prognostic Value of Small-Sized Platelet Aggregates in Unstable Angina: Detection by a Novel Laser-Light Scattering Method

2001 ◽  
Vol 101 (3) ◽  
pp. 109-118 ◽  
Author(s):  
Ichiro Kajiwara ◽  
Hisao Ogawa ◽  
Hirofumi Soejima ◽  
Keiji Takazoe ◽  
Shinzo Miyamoto ◽  
...  
Keyword(s):  
Light Scattering ◽  
Unstable Angina ◽  
Prognostic Value ◽  
Laser Light ◽  
Laser Light Scattering ◽  
Scattering Method ◽  
Platelet Aggregates

Inspection Of Recombination Active Defects For Sige And Solar Cells

1996 ◽  
Vol 442 ◽  
Author(s):  
O.V. Astafiev ◽  
V.P. Kalinushkin ◽  
N.V. Abrosimov
Keyword(s):  
Solar Cells ◽  
Solar Cell ◽  
Light Scattering ◽  
Grain Boundary ◽  
Single Crystals ◽  
Defect Structure ◽  
Scattering Method ◽  
Recombination Activity ◽  
Cell Production ◽  
Materials Used

AbstractMapping Low Angle Light Scattering method (MLALS) is proposed to study defect structure in materials used for solar cell production. Several types of defects are observed in Czochralski Si1−xGex (0.022<x<0.047) single crystals. Recombination activity of these defects is investigated. The possibility of contactless visualisation of grain boundary recombination in polysilicon is also demonstrated.

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